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8. Abbreviations
9. Directives and standards
This is to declare that the component mentioned above fulfils all the relevant provisions of
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Directive 2009/42/EG
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Directive 2006/42/EC
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Directive 2004/108/EC
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Standard EN 60204-1
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Standard EN 61000-6-4
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Standard EN 61000-6-2
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Standard EN 61010-1
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Standard EN ISO 12100-1/2
4QBSD
Four quadrant backscattered electron detector
BSD
Backscattered electron detector
BSE
Backscattered electron
CC
Charge Compensator
COMPO
Detects compositional contrast Detection of contrast between areas
with different chemical
compositions
EHT
Extra High Tension
FESEM
Field emission scanning electron microscope
GIS
Gas injection system
ODF
Orientated Dark Field
Q1
Quadrant 1
SE
Secondary Electron
STEM
Scanning transmission electron mircroscopy
TOPO
Topographic contrast
Detects changes of the specimen surface angle
Denomination:
4QBSD