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6.3. Troubleshooting
The 4QBSD is not user-serviceable.
In case of a defect, contact your local ZEISS service representative for assistance.
7. De-installation and disposal
The 4QBSD is de-installed and disposed of by an authorised ZEISS service representative only.
Symptom
Possible reason/s
Recommended action/s
The 4QBSD cannot be
inserted.
Stage is not initialised.
Charge Compensator (CC)
is inserted.
STEM is inserted.
Gas injection system (GIS)
is inserted.
Safe 4QBSD is invalid.
Initialise the stage.
Retract the Charge Compensator.
Retract the STEM.
Retract the GIS.
Call your local ZEISS. service repre-
sentative.
The 4QBSD cannot be
retracted.
The compressed air supply is not
installed.
Check, if the compressed air supply
is installed.
No image
The electron beam is off.
Turn on the EHT.
No image
The electron beam is blanked.
Unblank the electron beam.
No image in a quadrant.
Diode is defect.
Call your local ZEISS service repre-
sentative.
Stored position cannot be
recalled.
The stage movement is disabled.
Initialise the stage.