fåëíêìÅíáçå=j~åì~ä=Qn_pa=ÉåMP
=QN=çÑ=QS
SK=j~áåíÉå~åÅÉ=~åÇ=êÉé~áê
6. Maintenance and repair
DANGER
Danger to life: Hazardous voltage inside the FESEM.
Only service representatives trained and authorised by ZEISS are allowed to service the
FESEM and to perform work on the electrical system of the FESEM.
6.1. Resetting touch alarm
When the 4QBSD touches the stage, an audible warning and an on-screen message appear.
1
Click on
OK
to accept the warning.
A warning appears that the stage initialisation
is required.
2
Click on
OK
to accept the warning.
3
Move the stage to a safe position.
4
Retract the 4QBSD.
5
Initialise the stage:
Select
Stage Initialise
in the
Stage
menu.