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3.3. Technical data
3.3.1. Product identification
3.3.2. Specification
3.4. System requirements
Requirements to run the 4QBSD:
•
SmartSEM
®
version 5.03 or higher
Workstation
4QBSD
ZEISS part no.
SUPRA
®
series
ULTRA series
NVision 40
AURIGA
®
4QBSD
347806-9055-000
SUPRA
®
60
ULTRA 60
AURIGA
®
60
4QBSD (long version)
347606-9055-000
MERLIN
™
4QBSD-Pneumatic
346006-9055-000
Feature
Specification
Travel 320
mm
Travel speed
30-60 mm/s
Repeatability
X-axis: ± 5 µm
Y-axis: ± 5 µm
Z-axis: ± 25 µm
Fine adjustment
X-, Y-, Z-axis: ± 5 mm