Series 65
INSTALLATION
980029EB
Edition 2019-10-11
71/103
5.2
Close valve
Local operation:
(‘Control Performance Analyzer’)
Remote operation:
(Refer to chapter «OUTPUT Buffer» > «CONTROL MODE
SETPOINT» for details)
Push CLOSE button
Refer to “Logic Interface” for details.
5.3
Open valve
Local operation:
(‘Control Performance Analyzer’)
Remote operation:
(Refer to chapter «OUTPUT Buffer» > «CONTROL MODE
SETPOINT» for details)
Push OPEN button
Refer to “Logic Interface” for details.
5.4
Position control
The valve position is directly controlled according to the position setpoint.
Local operation:
(‘Control Performance Analyzer’)
Remote operation:
(Refer to chapter «OUTPUT Buffer» > «POSITION
SETPOINT» for details)
Select or enter position setpoint
Refer to “Logic Interface” for details.
5.5
Pressure control
To prepare valve for PRESSURE CONTROL perform complete «Setup procedure».
The valve has parameters that may be modified to tune pressure control
performance. Refer to «Tuning of control performance».
The included PID controller controls the chamber pressure according to the pressure setpoint by means
of the valve position. The PID controller works with an adaptive algorithm to achieve best results under
altering conditions (gasflow, gas type).
Local operation:
with ‘Control Performance Analyzer’ 4.0, refer to
chapter: «Local operation»
Remote operation:
1. Open the CPA 4.0
2. Click [Local]
3. Click [Parameters]
4. Click [Pressure Control] and do the settings
5. Click [Save]
Refer to “Logic Interface” for details.
