INSTALLATION
Series 65
46/103
Edition 2019-10-11
980029EB
Threshold High [SFS low
sensor]
Threshold Low [SFS low
sensor]
Defines the crossover area in Crossover Mode ‘Soft Switch’ and
‘Hard Switch’.
Example: Threshold High = 1.0 [SFS of low sensor]
Threshold Low = 0.9 [SFS of low sensor]
Soft switch:
At pressure <= 0.9*SFS low sensor:
Actual Pressure = Sensor low pressure
At pressure 0.95*SFS low sensor:
Actual Pressure = 50% * Sensor low pr 50% sensor
high pressure
At pressure >= 1.0*SFS low sensor:
Actual Pressure = Sensor high pressure
Hard switch:
At pressure increase over 1.0*SFS low sensor:
Actual Pressure = Sensor high pressure after
Delay
At pressure decrease under 0.9*SFS low sensor:
Actual Pressure = Sensor low pressure after
Delay
Delay
Switch over delay in Crossover Mode ‘Hard Switch’, see example
above.
Analog sensors:
0
-1
0
V
(
A
n
a
lo
g
i
n
te
rf
a
c
e
)
High range
sensor
Low range
sensor
0
-1
0
V
(
A
n
a
lo
g
i
n
te
rf
a
c
e
)
SENSOR 1 READING
0-100%
100 mTorr
1 Torr
0 mTorr
SENSOR 2 READING
0-10%
PRESSURE
0-100%
