FRG-700 Inverted Magnetron Pirani Gauge
7
2 Technical
Data
Measuring range (air, N
2
) 5×10
-9
… 1000 mbar
Accuracy (N
2
)
≈
±30%
in the range 1×10
-8
… 100 mbar
Reproducibility
≈
±5%
in the range 1×10
-8
… 100 mbar
Gas type dependence
→
Appendix B
Output signal (measuring signal)
Voltage range
0 … +10.5 V
Measuring range
1.82 … 8.6 V
Voltage vs. pressure
logarithmic, 0.6 V / decade
(
→
Appendix )
Error signal
<0.5 V no supply
>9.5 V Pirani measurement element
defective (filament rupture)
Output impedance
2×10
Ω
Minimum loaded impedance
10 k
Ω
, short-circuit proof
Response time (pressure dependent)
p > 10
-6
mbar
p = 10
-8
mbar
<
10 ms
≈
1000 ms
Gauge identification
85 k
Ω
referenced to supply common
Status Pin
6
p > 10
-2
mbar
Pirani-only mode
Low = 0 V
p < 10
-2
mbar
Cold cathode not ignited
Pirani-only mode
Low = 0 V
p < 10
-2
mbar
Cold cathode ignited
Combined Pirani / cold cathode
mode
High = 15 … 30 VDC
Lamp
High voltage on (LED on)
Supply
DANGER
The gauge may only be connected to power supplies, instruments or
control devices that conform to the requirements of a grounded extra-
low voltage (SELV-E according to EN 61010). The connection to the
gauge has to be fused
1)
.
Supply voltage at the gauge
15.0 … 30.0 VDC (ripple
≤
1 V
pp
)
Power consumption
≤
2 W
Fuse
1)
≤
1 AT
The minimum voltage of the power supply must be increased proportionally to the
length of the sensor cable.
Voltage at the supply unit with
maximum line length
16.0 … 30.0 VDC (ripple
≤
1 V
pp
)
1)
VARIAN controller fulfill these requirements.
