FRG-700 Inverted Magnetron Pirani Gauge
16
5 Deinstallation
DANGER
DANGER: contaminated parts
Contaminated parts can be detrimental to health and environment.
Before beginning to work, find out whether any parts are contami-
nated. Adhere to the relevant regulations and take the necessary
precautions when handling contaminated parts.
Caution
Caution: vacuum component
Dirt and damages impair the function of the vacuum component.
When handling vacuum components, take appropriate measures to
ensure cleanliness and prevent damages.
Caution
Caution: dirt sensitive area
Touching the product or parts thereof with bare hands increases the
desorption rate.
Always wear clean, lint-free gloves and use clean tools when working
in this area.
n
Vent the vacuum system.
o
Put the gauge out off operation and unplug the sensor cable.
p
Remove the gauge from the vacuum system and install the protective lid.
When deinstalling the CF flange connection, it may be
advantageous to temporarily remove the magnet unit (
→
12).
Protective lid
Procedure
