FRG-700 Inverted Magnetron Pirani Gauge
12
•
Allen wrench AF 1.5
•
Open-end wrench AF 7
7
4
2
1
3
a) Unfasten the hexagon socket set screw (1) on the electronics unit (2).
b) Remove the electronics unit
without twisting it
.
c) Unfasten the hexagon head screw (3) on the magnet unit (4) and remove the
magnet unit.
The magnetic force and the tendency to tilt make it difficult to
separate the magnet unit and the measuring chamber (7).
d) Make the flange connection between the gauge and the vacuum system.
e) Remount the magnet unit and lock it with the hexagon head screw (3).
f) Carefully mount the electronics unit (2). (Make sure the pin of the Pirani ele-
ment is properly plugged into the corresponding hole of the electronics unit.)
g) Push the electronics unit up to the mechanical stop and lock it with the hexagon
socket set screw (1).
3.1.1 Removing the Magnet
Unit (Only for Gauges
With CF Flanges)
Tools required
Procedure
