FRG-700 Inverted Magnetron Pirani Gauge
5
Contents
Warranty 3
Warranty Replacement and Adjustment
3
Product Identification
4
Validity
4
Intended Use
4
Functional Principle
4
1
Safety 6
1.1
Symbols Used
6
1.2
Personnel Qualifications
6
1.3
General Safety Instructions
6
2
Technical Data
7
3
Installation 10
3.1
Vacuum Connection
10
3.1.1
Removing the Magnet Unit (Only for Gauges With CF Flanges)
12
3.2
Electrical Connection
13
3.2.1
Use With an VARIAN Controller
13
3.2.2
Use With Another Control Device
13
4
Operation 14
4.1
Measurement Principle, Measuring Behavior
14
5
Deinstallation 16
6
Maintenance 17
6.1
Adjusting the Gauge
17
6.2
Cleaning and Replacing Parts
19
6.2.1
Disassembling 19
6.2.2
Cleaning 20
6.2.3
Reassembling 21
6.3
Troubleshooting 23
7
Spare Parts
24
8
Returning the Product
25
9
Disposal 25
Appendix 26
A:
Measuring Signal vs. Pressure
26
B:
Gas Type Dependence
27
For cross-references within this document, the symbol (
→
XY) is used.
