FRG-700 Inverted Magnetron Pirani Gauge
6
Intended Use
The Inverted Magnetron Pirani Gauge FRG-700 has been
designed for vacuum measurement in the pressure range of
5×10
-9
… 1000 mbar.
The Inverted Magnetron Pirani Gauge must not be used for
measuring flammable or combustible gases which react in air.
The gauge can be operated in connection with a VARIAN
FRG Control Unit, a VARIAN Turbo AG Rack Controller, or with
another controller.
Functional Principle
The gauge consists of two separate measurement systems
(Pirani and cold cathode system) the signals of which are
combined in such a way that one measurement signal is output.
The Pirani measurement circuit is always on.