FRG-700 Inverted Magnetron Pirani Gauge
12
Materials on the vacuum side
Vacuum connection
Measurement chamber
Feedthrough isolation
Internal seal
Anode
Ignition aid
Pirani measurement tube
Pirani filament
stainless steel
stainless steel
ceramic
FPM 75
Mo
stainless steel
Ni, Au
W
Internal volume
≈
20 cm³
Pressure
≤
10 bar (absolute),
limited to inert gases
Temperatures
Operation
Bakeout
Pirani filament
Storage
+5 … +55 °C
150 °C (without electronics
and magnetic shielding)
120
°
C
-40 … +65 °C
Relative humidity
≤
80% at temperatures
≤
+31°C decreasing to 50%
at +40°C
Mounting orientation
any
Use
indoors only, altitude up to
2000 m
Type of protection
IP 40
