FRG-700 Inverted Magnetron Pirani Gauge
14
Measuring Signal vs. Pressure
Pressure p
1E+04
1E+02
1E+00
U [V]
0.00.5 1.5 2.5 3.5 4.5 5.5 6.5 7.5 8.5 9.5 10.5
1E–02
1E–04
1E–06
1E–08
se
n
sor
er
ro
r
un
der
ra
nge
ove
rr
ang
e
sen
sor
er
ror
Pa
mbar
torr
p = 10
1.667U-d
Measurement signal U [V]
p = 10
1.667×U-d
⇔
U = c + 0.6log
10
p
mbar Pa Torr
d 11.33 9.33 11.46
c 6.8 5.6 6.875
valid in the range 5×10
-9
mbar <p< 1000 mbar
3.8×10
-9
Torr <p< 750 Torr
5×10
-7
Pa <p< 1×10
5
Pa
