FRG-700 Inverted Magnetron Pirani Gauge
10
2 Technical
Data
Measuring range (air, N
2
) 5×10
-9
… 1000 mbar
Accuracy
≈
±30% (in the range
1×10
-8
… 100 mbar)
Repeatability
≈
±5% (in the range
1×10
-8
… 100 mbar)
Output signal (measuring signal)
Voltage range
0 … +10.5 V
Measurement range
1.82 … 8.6 V
Voltage vs. pressure
logarithmic , 0.6 V/decade
Error signal
<0.5 V no supply
>9.5 V Pirani sensor de-
fective (filament rupture)
Output impedance
2×10
Ω
Minimum loaded impedance
10 k
Ω
, short-circuit proof
Response time
p > 10
-6
mbar
(pressure dependent)
<10 ms
p = 10
-8
mbar
≈
1000 ms
Identification gauge
85 k
Ω
, referenced to
supply common
Status pin
6
p > 10
-2
mbar
Pirani-only mode
Low = 0 V
p < 10
-2
mbar
Cold cathode not ignited
Pirani-only mode
Low = 0 V
p < 10
-2
mbar
Cold cathode ignited
Combined Pirani / cold
cathode mode
High = 15 … 30 VDC
LED
High voltage on (LED on)
