Varian 919-1115 Instruction Manual Download Page 20

TECHNICAL INFORMATION 

Fig. 16 - Typical installation 

INLET FLANGE CONNECTION 

The pump should be mounted allowing a sufficient 
clearance for installation and removal of the high 
voltage connector. 

To achieve good performance of the ion pump at 
low vacuum pressure, it is critical that atmospheric 
pollution and dust must not enter the pump during 
venting. This type of contamination will not be re-
moved by the standard high temperature bake 
procedure and may degrade ion pump perform-
ance. The pump should be kept sealed with its 
pinch-off tubulation until it is ready for attachment 
to the vacuum system. Before venting the pump, 
consult the inspection procedure (see preceding 
paragraph). 

Vent the ion pump by opening the pinch-off tubula-
tion in a clean area free from smog, dust, pollen, 
etc. Venting with dry nitrogen gas is further rec-
ommended. This can be done by placing a clean 
polyethylene bag over the ion pump flange. Small 
pumps can be placed inside of the bag. Purge the 
bag with clean, dry nitrogen for several minutes, 
then reach into the bag and release the internal 
vacuum using pliers to open the copper tube 
pinch-off. 

   CAUTION 

Do not open the pinch off-seal with a saw or 
grinder. These methods will cause metal particles 
to be drawn into the pump by the inrushing air as 
the pump is opened. 

,

WARNING!

 

The pinch-off seal is extremely sharp. Be careful 
when opening. Watch your fingers. 

Use appropriate procedures to maintain the clean 
condition of the pump and vacuum system. 

Unscrew the main flange bolts. Remove the Con-
Flat flange and the copper gasket plate. Some par-
ticles of copper oxide may adhere to the outer 
edge of the flange gasket. Be careful not to allow 
them or any other foreign materials to fall into the 
pump. 

Connect the ion pump to the vacuum chamber 
with a short length and large diameter tubulation in 
order to retain as much pumping speed as possi-
ble. Proceed as follows: 

1.  Inspect the mating flanges for cleanliness and 

absence of scratches on the knife edge. 

2. Place a new copper gasket between pump 

flange and vacuum chamber flange. 

3.  Bolt mating flanges of the pump to the chamber 

with the screws provided with the ion pump. 
For flanges over NW 35 (2.75" o.d.) also mount 
washers below the nuts and screw heads. 

NOTE 

Lubrication is essential to prevent galling of the nut 
and screw after bakeout. 

 15 

87-900-106-01(B) 

Summary of Contents for 919-1115

Page 1: ...del 919 1115 Model 919 1125 Model 919 1145 Model 919 1146 Model 919 1114 Model 919 1124 Model 919 1144 I MANUALE DI ISTRUZIONI D BEDIENUNGSHANDBUCH F NOTICE DE MODE D EMPLOI GB INSTRUCTION MANUAL 87 9...

Page 2: ...VacIon Plus 20...

Page 3: ......

Page 4: ......

Page 5: ...Vacuum evaluation 14 Short circuits 14 TYPICAL INSTALLATION 14 INLET FLANGE CONNECTION 15 CONTROL UNIT CONNECTION 16 SAFETY INTERLOCK 16 HEATER INSTALLATION 16 HEATER REPLACEMENT 17 BAKEOUT OPERATION...

Page 6: ...engono informazioni importanti estrapolate dal te sto PREPARAZIONE PER L INSTALLAZIONE La pompa viene fornita in un imballo protettivo speciale se si presentano segni di danni che potrebbero essersi v...

Page 7: ...zione all aria il deposito del composto di titanio assorbe vapore acqueo in con seguenza di ci al successivo avvio il riscaldamento della pom pa provoca il rilascio del vapore e di parte dell idrogeno...

Page 8: ...hr besteht ACHTUNG Die Warnhinweise vor bestimmten Prozeduren machen den Bediener darauf aufmerksam da bei Nichteinhaltung Sch den am Ger t entstehen k nnen W hrend des Betriebes soll die Umgebungstem...

Page 9: ...stromwert der Steuereinheit ann hert weist auf eine Leckstelle an der Pumpe und am System hin Ein zeitweiliger Anstieg des Vorvakuumdruckes ist w hrend der Anlaufphase nor mal 4 W hrend des Anlaufes d...

Page 10: ...fonctionne ment pour respecter les sp cifications techniques d clar es la temp rature ambiante doit tre comprise entre 0 C et 85 C ATTENTION Les messages d attention apparaissent avant certaines proc...

Page 11: ...400 V Une valeur de courant proche du courant de court circuit de l unit de contr le r v le l existence d une fuite dans la pompe et dans le syst me Au cours de la phase de d marrage un accroissement...

Page 12: ...in explosive environments or those with a high fire risk Dur ing operation to obtain the specified operation the ambient temperature must be between 0 C and 85 C CAUTION The caution messages are displ...

Page 13: ...umped hydrogen thus the starting time may be lengthened CAUTION Do not put any electronic device near the pump otherwise the magnetic field around it may cause a device malfunctioning MAINTENANCE Oper...

Page 14: ...ty high voltage supply is required to operate Diode and Noble Diode pumps A nega tive polarity high voltage supply is required to op erate StarCell pump since the anode is grounded and the cathode is...

Page 15: ...ate the VacIon Plus 20 pump it normally requires an amount of gas equal to 0 6 Torr litres mbar litres Consequently pumps can operate for extended periods of time at low pressures in the non saturated...

Page 16: ...TECHNICAL INFORMATION VACION PLUS 20 NOBLE DIODE Fig 6 Pumping speed vs pressure for Nitrogen Fig 7 Pumping speed vs pressure for Argon Fig 8 Pressure vs current diagram 11 87 900 106 01 B...

Page 17: ...0 DIODE Fig 9 Pumping speed vs pressure for Nitrogen Fig 10 Pressure vs current diagram OUTLINE DRAWING The following figure shows the outline drawing for the VacIon Plus pump Fig 11 VacIon Plus pump...

Page 18: ...ne of the pump and in the plane of the flange as a function of distance from the pump are shown in Figs 13 14 and 15 Fig 12 VacIon Plus pump axis identification Fig 13 Stray magnetic field along X axi...

Page 19: ...or an indication of one of the following conditions If the pump is free of leaks and is at a low pressure the pressure indication shall within 10 minutes fall to or below the 10 8 Torr mbar range as t...

Page 20: ...nal vacuum using pliers to open the copper tube pinch off CAUTION Do not open the pinch off seal with a saw or grinder These methods will cause metal particles to be drawn into the pump by the inrushi...

Page 21: ...or blanked off WARNING Before removing the high voltage connector of the cable from the control unit be sure the main power is removed from the control unit Wait at least 10 seconds after removing the...

Page 22: ...the pump and system cool down to room temperature a drop in pressure should be ob served Note that the ion pump can be also baked when switched off into an external turbo pump through a bakeable isola...

Page 23: ...it be sure the main power is removed from the control unit Before removing the high voltage connector of the cable from the control unit be sure the main power is removed from the control unit Wait at...

Page 24: ...emis sion current high potting should be performed High potting is the term used to describe the ap plication of higher than normal operating voltage 10 12 KV 20 50 mA for the purpose of burning off...

Page 25: ...and pump Subse quent reduction in pressure de pends on the rate of depletion of this vapour Heavy hydrocarbons are most troublesome because of their relative low vapour pressure and they are very diff...

Page 26: ...Ferrite magnets 919 0040 919 0039 919 0035 Samarium Cobalt magnets 919 0036 Heaters 120V 220V 919 0044 919 0043 Copper gasket for 2 3 4 inlet flange 10 pack individually sealed FG 0275 CI Nut and bolt...

Page 27: ...0 Vac 2 Neg 120 Vac 1 Pos 120 Vac 2 Pos 230 Vac 1 Neg 230 Vac 2 Neg 230 Vac 1 Pos 230 Vac 2 Pos 929 7008 929 7009 929 7010 929 7011 929 7012 929 7013 929 7014 929 7015 MidiVac 120 Vac with single outp...

Page 28: ...TIFICATION Product Description Varian P N Varian S N Purchase Reference TYPE OF RETURN check appropriate box Paid Exchange Paid Repair Warranty Exchange Warranty Repair Loaner Return Credit Shipping E...

Page 29: ...rate No zero high backround Gauge tube not working Display problem Vacuum system unstable Cannot reach test mode Communication failure Degas not working Failed to start Other Error code on display Oth...

Page 30: ...1263 Toll Free 0120 655 040 Korea Varian Technologies Korea Ltd Shinsa 2nd Bldg 2F 966 5 Daechi dong Kangnam gu Seoul Korea 135 280 Tel 82 2 3452 2452 Fax 82 2 3452 2451 Toll Free 080 222 2452 Mexico...

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