TECHNICAL INFORMATION
The pumping speed of a newly regenerated (i.e.
baked) sputter ion pump decreases during opera-
tion until it reaches a stabilized level known as
"saturation" (nominal pumping speed). To saturate
the VacIon
Plus
20 pump, it normally requires an
amount of gas equal to 0.6 Torr-litres (mbar-litres).
Consequently, pumps can operate for extended
periods of time at low pressures in the non-
saturated state, if they are properly conditioned.
VACION
PLUS
20 STARCELL
Fig. 3 - Pumping speed vs pressure for Nitrogen
Fig. 4 - Pumping speed vs pressure for Argon
Fig. 5 - Pressure vs current diagram
10
87-900-106-01(B)
