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Varian ELSD Service Manual
Replacing The Mass Flow Controller
When required:
Faulty Mass Flow controller
Tools required:
Allen Keys
Parts required:
Mass-Flow Controller (# PL0890-0400)
Open the detector’s side panel using
the access key.
Unplug the two black gas lines from
either end of the Mass flow controller.
Disconnect the Mass flow controller
cable from the top the MFC.
Remove the four screws, located
underneath the base of the instrument,
to remove the mass flow controller
assembly.
Insert the replacement mass-flow
controller and reconnect the gas lines
and control cable.