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ULVAC CRYOGENICS INCORPORATED
Since helium is filled in this equipment as well as in the maintenance parts (cold head, oil
adsorber), do not disassemble these parts. When you have to disassemble or dispose such
parts, discharge helium using the optional charging adapter kit.
Be sure to turn off the main power source before performing the maintenance work.
WARNING
WARNING
Summary of Contents for UMP-40W
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