Ulvac UMP-40W, Instruction Manual

Page: 34 / 52

28 ULVAC CRYOGENICS INCORPORATED
Table 9-6 N2 MONITOR descriptions
Item Description
①
GN2 SUPPLY Displays supply flow rate of nitrogen gas
②
GN2 DISCHARGE Displays discharge flow rate of nitrogen gas
③
DEWAR PRESSURE Displays pressure inside the dewar
④
DEWAR LN2 LEVEL Displays the volume of liquid nitrogen inside the dewar
ETM
Touch ETM in MENU to display the screen in Figure 9-12.
The elapsed time of operation is displayed for nitrogen generator, compressor, and refrigerator.
Figure 9-12 ETM
LN2 DISCHARGE
Touch LN2 DISCHARGE in MENU to display the screen in Figure 9-13.
This menu is for the maintenance work.
Press DISCHARGE START to discharge LN
2
in the dewar.
DISCHARGE STOP stops discharging LN
2
.
Figure 9-13 LN2 DISCHARGE