Ulvac UMP-40W, Instruction Manual

Page: 19 / 52

ULVAC CRYOGENICS INCORPORATED 13
Figure 6-1 Allowable range of cooling water for UMP-40W
W
at
er
P
re
s
s
ur
e L
os
s
[
M
Pa
]
Water flow rate
Upper limit
Water Flow Rate [L/min]
Acceptable
operating
range
Allowable
*See CAUTION
on next page
(3) 0.06MPa
(1) 30
℃
(2) > 9L/min
W
at
er
I
n
let
T
e
m
p
er
at
ur
e
[°
C
]
Water flow rate
lower limit
Temperature
Upper limit
Temperature Lower limit
Water Flow Rate [L/min]