Ulvac UMP-40W, Instruction Manual

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ULVAC CRYOGENICS INCORPORATED 1
Safety Instructions
To this unit, voltage that would cause electrocution or serious injuries is applied. It is extremely
dangerous to touch the live part inside the unit. Make sure to turn OFF the main power source before
performing installation, maintenance or repair. Contacting the internal parts that are not insulated
may damage human body or equipment.
Connect the earth wire to D type grounding.
Nitrogen gas itself is not toxic to human bodies but it reduces the oxygen level in the atmosphere (the
oxygen concentration of 18% or below is defined as an oxygen-depleted state). Install the equipment
on a well-ventilated place, and add a ventilating fan with a capacity of at least 2000 m
3
/hr airflow.
Do not stay together with a dewar containing liquid nitrogen in a sealed space, such as an elevator or a
car.
The volume of nitrogen gas is 700 times of liquid nitrogen. Sealing liquid nitrogen in an airtight
space produces high-pressure gas of 700 atm and may result in explosion. Use liquid nitrogen in the
condition constantly open to the air.
2. Danger of oxygen deficiency: Ventilate well.
1. Danger of electric shock: Do not touch the live part.
3. Danger of explosion: Do not seal LN
2
.