SK00-4802-DI-002-04
No.16.10.20
14
3.2 Oil filling
(1) Prepare a well washed and dry graduated cylinder (500 to 1,000cc).
(2) Pour the specified amount (ULK-04A: 150cc; ULK06A: 350cc, ULK-10A: 800cc, ULK-14A:
1,500cc) of given oil (ULVOILD-11 or ULVOIL D-31) into the graduated cylinder.
(3) Pour oil into the air outlet.
Be sure to pour the specified amount of oil. (See Table 1)
The heater capacity depends on the oil type. Be careful.
The hydraulic fluid is indicated on the air outlet flange. Confirm it at the time of your purchase.
Be sure to pour the specified amount (See Table 1.)
(Do not use fluorine-based oil.) An oil diffusion pump operates at a high
temperature and therefore fluorine oil may be decomposed producing
toxic gas.
Use a vacuum pump oil we specifies. Use of oil other than those specified
is not covered by the warranty because it causes the pump performance
to deteriorate, which results in a shorter pump life, or in some cases,
causes risks, such as damage to or explosion of the pump.
Do not mix two or more vacuum pump oil types.
(1) Wear protective gears, such as rubber gloves and protective glasses,
when pouring oil.
(2) Read "1.2 Material Safety Data Sheet" before pouring oil.
In the event where the vacuum pump oil comes into contact with your
hand or your eye, follow the FIRST AID MEASURES section in the
material safety data sheet.
WARNING
CAUTION
CAUTION
CAUTION
