SK00-4802-DI-002-04
No.16.10.20
iii
0.3 Safety precautions
This section describes a way to avoid dangers and dangerous behavior to be avoided for each work.
About this product and this instructions manual
To use this product for many years, be sure to read this instructions
manual before installation, operation, inspection, or maintenance of
this product and fully understand the safety precautions,
specifications, and operation method of this product.
If toxic and combustible/flammable gases other than inactive gas are
discharged by the vacuum pump, it cannot be used since leakage may
occur from the pump body.
If combustible/flammable gas and materials other than inactive gas are
discharged by the vacuum pump, it cannot be used since
ignition/explosion may occur in the vacuum pump.
If toxic gas is sucked in the vacuum pump, it goes without saying that
not only the pump body but also the pump oil will be toxic. Take care
during the maintenance work.
If the details on the hazardous substances you have used are not
disclosed, or if substances that are hard to detoxify are exhausted, we
may refuse maintenance and other operations at your site.
Note that the specifications, prices, etc. of the product and the
description of the instructions manual are subject to change without
prior notice for improvement. When any changes are made, the
document number at the upper right of the front cover of the
instructions manual is updated and the document is released as a
revised version.
Be sure to give this instructions manual to the end user of the product.
For export of this product to countries other than Japan, it shall be
examined by the Foreign Exchange and Foreign Trade Control Act,
and government ordinances, ministerial ordinances, directives, etc.
related to the act.
Contact the nearest sales office, agency, or our Components Division.
In no case, all or part of this instructions manual may be copied for
any third party without our permission.
WARNING
WARNING
WARNING
WARNING
DANGER
DANGER
DANGER
DANGER
CAUTION
