SK00-4802-DI-002-04
No.16.10.20
17
Install a valve on the way to the vacuum chamber.
When stopping this unit, keep the inside of this unit in vacuum.
3.5 Exhaust port pipe (Piping to auxiliary pump)
(1) Thoroughly clean the inside of the piping, vacuum valves, etc. and then connect to the pump. If
it is connected under a dirty condition, the ultimate pressure becomes higher or the time
required for the pressure to decrease down to a given pressure becomes longer.
Do not touch any part under vacuum by bare hands but wear clean nylon gloves.
(2) Remove the gaskets set on the inlet and outlet port flanges, lightly wipe them with a cloth
moistened with a solution, such as alcohol to remove dirt on the surface.
(3) Do not apply even grease with a low vapor pressure to the gasket surfaces.
Only wipe dirt off.
(4) Also wipe the gasket grooves on the flange and the corresponding flange surfaces with a clean
cloth.
(5) Set gaskets in place.
(6) Connect the outlet port with the piping using a JIS vacuum flange.
(1) Be sure to use pipes made of conductive material (allowing a current to
flow).
Use of a nonconductive material may cause static electricity when
exhaust gas passes and charge itself with electricity, which makes a
spark, resulting in a source of ignition.
(2) In the process where combustion or flammable gas flows, use
diluent gas. Supply the diluent gas from the intake port so that the
exhaust gas concentration is lower than the explosion limit.
CAUTION
DANGER
