Ulvac ULK-04A Instruction Manual Download Page 1

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SK00-4802-DI-002-04

No.16.10.20

Instructions Manual

Oil Diffusion Pump

MODEL

ULK-04A
ULK-06A
ULK-10A
ULK-14A

ULVAC, INC.

Components Division

http://www.ulvac.co.jp/

Be sure to read the manual before using this product.
In addition, keep it in a safe and readily available
place.

Summary of Contents for ULK-04A

Page 1: ...tructions Manual Oil Diffusion Pump MODEL ULK 04A ULK 06A ULK 10A ULK 14A ULVAC INC Components Division http www ulvac co jp Be sure to read the manual before using this product In addition keep it in...

Page 2: ...oesn t follow the same regulations or if any changes are made to the product itself it may not be guaranteed to have its performance and safety We don t guarantee have no responsibility for such perfo...

Page 3: ...erator s death or serious injury This indicates a potentially hazardous situation which if the product is misused may result in operator s moderate injury or serious damage to the machinery This indic...

Page 4: ...toxic Take care during the maintenance work If the details on the hazardous substances you have used are not disclosed or if substances that are hard to detoxify are exhausted we may refuse maintenan...

Page 5: ...ntenance of equipment may cause the pump to fall or turn over Never get under the pump 4 Instruct operators to wear leather gloves and use appropriate tools or they may get injured by broken pieces of...

Page 6: ...rting work check that all dangerous energies are shut out Wiring work shall be performed only by qualified personnel Wrong wiring work may trigger fire Wiring work shall be performed correctly accordi...

Page 7: ...opening of the heater Otherwise an electric shock injury fire etc may occur 3 Never place any flammable object in the area within 1m from the vacuum pump Otherwise fire may occur Before inspection re...

Page 8: ...duct depending on the water quality which reduces the cooling efficiency In addition chlorine ions may corrode from the inner wall causing cooling water leakage Note that in such a case the repair wil...

Page 9: ...t of the cooling water supply source for devices check that no water flows Intake and exhaust piping Removal Remove according to the installation manual of the device The pumping lines stay at extreme...

Page 10: ...t burned Don t touch WARNING In the area around where this warning label is attached you may get an electric shock At the time of piping maintenance be sure to turn off the power before operation Be s...

Page 11: ...a crane please to transportation to lift for it 3 Any person other than those having technical qualifications shall not perform cargo handling operation and operate cargo handling equipment 4 Unreason...

Page 12: ...le 6 Pull up gaskets for the air inlet and air outlet flange toward you and check the sealing surface of the flange for any damage 7 If the pump is not used soon return the lids of the air inlet and t...

Page 13: ...Dust is not allowed d The room shall be ventilated e The pump is not allowed to double stack and turn over and the heater and the oil level gauge are not allowed to stand with their ends facing down...

Page 14: ...f an overload protector For selection of an overload protector see 3 6 Electrical connection It is recommended to install protectors other than the overload protector such as a ground fault interrupte...

Page 15: ...Product specific risk and safety measure 1 1 1 1 Leakage of hazardous gas and substances 1 1 1 2 Transportation of heavy load items 1 1 1 3 Electric shock 2 1 1 4 High temperature 2 1 1 5 Leakage of h...

Page 16: ...2 5 Cleaning of pump 38 6 2 6 Assembling of nozzle 38 6 2 7 Attachment of pump in the line 39 6 2 8 Removal of heater 39 6 2 9 Attachment of new heater 42 6 3 Inspection after storage for long period...

Page 17: ...20 Figure 8 Example of thermostat connection circuit 27 Figure 9 Oil replacement instruction diagram 31 Figure 10 Nozzle pull out instruction diagram for ULK 04A ULK 06A 34 Figure 11 Exploded diagram...

Page 18: ...ul disposal please ask a professional contractor for the waste disposal to detoxify 3 Ask a waste disposal company with an administrative approval to dispose of the product You get injured by ignition...

Page 19: ...any thin rods etc in the opening of the heater The terminal burns out Securely tighten the terminal Check the tightened conditions once a month See 3 6 Electric Connection 1 1 4 High temperature Facto...

Page 20: ...ssure is high and the pumping action is lost causing back flow of the oil Critical back pressure ULK 04A D 11 40Pa ULK 04A D 31 60Pa ULK 06A D 11 40Pa ULK 06A D 31 60Pa ULK 10A D 11 35Pa ULK 10A D 31...

Page 21: ...rize not only during the operation but also under any circumstances Factor How to avoid Measure Explosion hazard Do not operate if there is no vacuum pump oil poured or its level is extremely low such...

Page 22: ...ly read the SDS to understand the hazardous characteristics described therein Any use of chemical substances other than those described in this document Vacuum pump oil ULVOIL D 11 is not covered unde...

Page 23: ...to collision with the water cooled pump case surface condenses there discharges thermal energy turns into liquid again The oil diffusion pumps under the ULK series are each largely classified into the...

Page 24: ...D151 VD201 PVD 180 PVD360 VD30C VD40C VD60C Model Specification ULK 10A ULK 14A Oil ULVOIL D 11 ULVOIL D 31 ULVOIL D 11 ULVOIL D 31 Pump Power 1 kW 2 0 2 4 2 25 2 4 Ultimate pressure Pa 2 6 10 5 2 6 1...

Page 25: ...SK00 4802 DI 002 04 No 16 10 20 8 Graph 1 Pumping speed curve for ULK 04A ULK 06A Graph 2 Pumping speed curve for ULK 10A ULK 14A...

Page 26: ...SK00 4802 DI 002 04 No 16 10 20 9 Figure 2 Oil diffusion vacuum pump Model No ULK 04A Dimensional appearance drawings...

Page 27: ...SK00 4802 DI 002 04 No 16 10 20 10 Figure 3 Oil diffusion vacuum pump Model No ULK 06A Dimensional appearance drawings...

Page 28: ...SK00 4802 DI 002 04 No 16 10 20 11 Figure 4 Oil diffusion vacuum pump Model No ULK 10A Dimensional appearance drawings...

Page 29: ...SK00 4802 DI 002 04 No 16 10 20 12 Figure 5 Oil diffusion vacuum pump Model No ULK 14A Dimensional appearance drawings...

Page 30: ...e turn up the air inlet flange loose type flange and install the flange in a horizontal position Lay out in consideration of installation removal inspection cleaning etc of the pump See Figs 2 to 5 Fo...

Page 31: ...e based oil An oil diffusion pump operates at a high temperature and therefore fluorine oil may be decomposed producing toxic gas Use a vacuum pump oil we specifies Use of oil other than those specifi...

Page 32: ...r cooling water as an interlock that stops the pump when the amount of water becomes equal to or lower than that specified 2 When operation is stopped during wintertime water in the water pipes may be...

Page 33: ...flows 3 4 Intake port pipe Connection to vacuum chamber side 1 Thoroughly clean the inside of the vacuum chamber piping vacuum valves etc and then connect to the pump If it is connected under a dirty...

Page 34: ...loth moistened with a solution such as alcohol to remove dirt on the surface 3 Do not apply even grease with a low vapor pressure to the gasket surfaces Only wipe dirt off 4 Also wipe the gasket groov...

Page 35: ...side of this unit in vacuum 3 Install a vacuum gauge on the way to the auxiliary pump in order to monitor the back pressure Note that if the diameter of the piping is small or any foreign substances a...

Page 36: ...ctromagnetic switch 1 Use of a voltage 200V or 220V other than that specified is not allowed 2 For the primary cable be sure to use heat resistance wires LKGB KGB Table 2 Oil diffusion vacuum pump Cur...

Page 37: ...ULK 04A ULK 06A Connect electric wires to terminal and The terminal of and leads to thermostat Figure 7 Connection of outside lines to terminal box for ULK 10A ULK 14A Without thermo With thermo Heat...

Page 38: ...k of an electric shock in the event of a breakdown or leakage of electricity In addition it is recommended to install a dedicated ground fault interrupter 1 Be sure to install overload protective equi...

Page 39: ...not pressure proofed Do not pressurize under any circumstances because it is dangerous Make sure that the valve for evacuation is open before evacuation Make sure that the back pressure and the pressu...

Page 40: ...uctioned 3 If it has suctioned chemical agents such as acid replace oil immediately after the suction since it is possible that the pump part is being corroded causing defects during one night downtim...

Page 41: ...re to pour the specified amount of oil using a graduated cylinder etc See Section 3 2 Oil filling 4 Cooling water flow rate check Check that the cooling water is flowing at a flow rate equal to or mor...

Page 42: ...orr or higher Oil is oxidized making a low ultimate pressure unable to reach 2 If an amount of gas equal to or higher than the maximum throughput is fed through the pump or if the auxiliary pressure b...

Page 43: ...f the operation stops and the ambient temperature becomes 5 or lower drain the water in the cooling water system Supply compressed air of 0 3MPaG gauge from the cooling water inlet port without stoppi...

Page 44: ...stat is opened arrange a circuit that shuts off the power to the heater If the thermostat is activated to shut off the power to the heater during the pump operation remove the cause of the abnormal in...

Page 45: ...es such as a change of color rust the gossan 6 2 Periodical Inspection The inspection items depend on the use conditions of the vacuum pump but periodically check the following items It is effective f...

Page 46: ...tom of the pump case the ultimate pressure is not recovered even after replacement of oil and an overhaul is necessary 6 2 3 Oil replacement For ULK 04A ULK 06A Drain of working fluid 1 After stopping...

Page 47: ...tion it is harmful to air tightness 2 Wipe the sealing surfaces of the flange and the gasket well with alcohol 3 Before tightening apply a molybdenum disulfide lubricant to all the bolt screw parts 4...

Page 48: ...he cap nut to a tightening torque of 120 N m 6 If the given ultimate pressure is not obtained even after the oil is replaced sediments including sludge has accumulated in the pump case in some cases I...

Page 49: ...reme care 2 Carefully wipe the sealing surfaces of the flange and the gasket before assembling clean and dry with alcohol Wear clean nylon gloves to avoid touching by bare hands 3 After putting the co...

Page 50: ...the latch of the cold cap Pull out the expansion ring retainer and the expansion ring 3 Take up the nozzle ring Also remove the cold cap bearing case bearing and shaft 4 Hold the 1st steam tower just...

Page 51: ...xagon nut M5 14 Screw 15 Fixing ring A 3 16 1st steam tower 17 Spring washer M5 18 Hexagon nut M8 19 Spring washer M8 20 2nd steam tower 21 3rd steam tower 22 4th steam tower 23 Long bolt 24 5th steam...

Page 52: ...ap support C and cold cap support beam B 3 Remove the hexagon socket head bolt and then remove the plain washer spacer cold cap and spacer in order from top 4 Turn the lower part of the 1st steam cyli...

Page 53: ...exagon socket head bolt M5 16 10 Plain washer For M5 11 Spacer 12 Cold cap 13 Spacer No Name 14 1st steam cylinder 15 Shim 1 ULK 14A only 16 2nd steam cylinder 17 Shim 2 ULK 14A only 18 Back flow chec...

Page 54: ...6 10 20 37 No Name 1 Hot cap 2 Plain washer For M5 3 Hexagon nut M5 4 Fixing ring 5 Distance pipe 6 Screw M5 7 Thermal radiation plate 8 1st steam cylinder Figure 13 Exploded diagram of 1st steam cyli...

Page 55: ...o the outermost notches on the nozzles At this point set them so that the ejector nozzle is positioned on the air outlet side For ULK 10A ULK 14A 1 Set the notches at the lower part of the 5th steam c...

Page 56: ...of heater The heater replacement should follow the heater replacement instructions It is basically recommended to request a service center to replace the heater 1 The pump is stopped 2 The temperatur...

Page 57: ...remove the electric wiring between the main and auxiliary terminals 2 Remove all connecting terminals for wire connections to the heater in the terminal box 3 Remove the nuts attached to the center of...

Page 58: ...ove the screws at the top of and before and after the boiler cover and then remove the heater cover 3 Figure 15 Removal work can be done in the reverse numerical order Assembling work can be done in t...

Page 59: ...t surface between the heater and the pump 4 Attach the reflector and securely tighten nut 4 2 5 Attach the heater cover in an oblique direction so that the heater terminals are put in the holes of the...

Page 60: ...mp is stored for a long period of time without operation it may not work properly due to occurrence of rust etc If it has not been used for a long period of time make a request of your nearest service...

Page 61: ...level 4 Supply oil Disassemble and inspect in the case of heating without water 3 2 6 2 1 6 2 7 5 Contamination of oil 5 Replace oil Overhaul if sludges or moisture exists 3 2 6 2 1 6 2 7 6 Oil seized...

Page 62: ...until the pump becomes hot 16 The heater cement has deteriorated 16 Replace the heater cement 6 2 8 6 2 9 17 The pressure measurement method is wrong 17 Measure the pressure properly 18 The exhaust p...

Page 63: ...for the pump body is clogged because calcium etc sediments inside 5 Clean the inside of the pipe 6 Cooling water contains impurities 6 Install a filter A pipe in the pump body is clogged clean the ins...

Page 64: ...evel 4 Feed the specified amount of cooling water 3 3 5 High cooling water temperature 5 Use a chiller etc 3 3 6 Heater cement has deteriorated 6 Apply heater cement again 6 2 8 6 2 9 7 Disposal When...

Page 65: ...year after shipping date from ULVAC 2 Direct export transaction one year after date of B L 8 3 Warrantee scope 1 Domestic business in Japan Product which has damage caused by a failure on delivery Pr...

Page 66: ...etc 3 Failure occurred due to carelessness handling or faulty usage 4 Products remodeled disassembled or repaired without ULVAC s acceptance 5 Failure occurred under abnormal environment such as inten...

Page 67: ...I D175 ULK 10A 8 8 I D275 ULK 14A 8 8 I D380 Air outlet gasket ULK 04A Nitrile rubber or fluorine contained rubber W4 I D39 5 V40 ULK 06A W4 I D54 5 V55 ULK 10A ULK 14A W4 I D99 V100 Oil ULVOIL D 11...

Page 68: ...ose Details on request Fault condition Other special notes Pollutant Check all that apply Ensure that the products above are not polluted The products above are polluted with the following harmful sub...

Page 69: ...ty period Table Making format for names and contents of hazardous substances or elements Name of parts Hazardous substances or elements Pb Hg Cd Cr6 PBB PBDE Body indicating that content of the hazard...

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