40
YK18-0012-AI-101-02
7. Specification
7.1 Performance specification
Model
YTP70A-D
Inlet port
ICF114,VG65,ISO63-K
Ultimate pressure (
※
1)
Pa
10
-6
Pumping
speed
(
※
2)
N2
L/s
70
He
L/s
60
H2
L/s
49
Backing pump
L/min
20
Weight
kg
17.5
Noise (
※
3)
dB(A)
43
Input power source
Single-phase AC100
～
240V
（
50/60Hz
）
Power capacity
W
300
dimension
Width
mm
318
Length
329
Height
ICF:405,VG/ISO
：
387
※
1: A digit number is expressed.
※
2: Without a protective net.
※
3: At ultimate pressure. Measured by ULVAC standard for ICF flange type.
▶
Specification
