Ulvac CRYO-U12H, Instruction Manual

Page: 34 / 102

Inspection
2-2 ULVAC CRYOGENICS INCORPORATED
2.2 First Inspection of Cryopump
Unpack the package of the cryopump and check the followings.
1. Confirm there is neither damage nor a dent in externals and accessories of
the pump, and is moreover no missing parts.
2. Remove the protective cover and confirm that there is no damage in the
mounting flange or 80K baffle. (After the inspection, the protective cover
should be put on again until the time of installation.)
3. Notice to “Hydrogen Vapor Pressure Gauge” users:
Make sure that the charge pressure shows 0.35
±
0.02 MPaG at room
temperature. The pressure depends on the room temperature. If it is lower
than 0.3 MPaG in ambient temperature range of 20
℃ ±
10
℃
, there is a
possibility of hydrogen leakage or defects of the pressure gauge.
4. For optional devices such as MBS-C CRYO-METER and DS-1 Diode Indicator,
please refer to instruction manuals of each device for more information.
If you find any missing parts or damages of the product, please contact our Service
Engineering Division or the nearest Customer Support Center.