Ulvac CRYO-U12H, Instruction Manual

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CRYO-U ® Cryopump Instruction Manual
a. Loosely connect the charging hose to the charge valve (V2) on the charging adapter.
b. Open the regulator until the outlet pressure reaches 0.1 to 0.2 MPaG. Allow helium gas
to flow out from the charging hose for about half a minute. Meanwhile, open the charge
valve (V2) slightly in order to drive out the air trapped in the charge valve.
c. Tighten the flair nut at the end of charging hose and close the valve (V2).
d. Start the roughing pump and open the valve (V3) slightly. Exhaust the helium gas in
the refrigerator unit while maintaining pressure below an allowable value of the
roughing pump. After the pressure reaches below the atmospheric pressure, the valve
(V3) can be fully opened. Therefore, monitor the pressure of the roughing pump head
with an appropriate pressure gauge. The maximum allowable pressure for ULVAC’s
small oil-sealed rotary pump and drypump is 0.01MPaG.
CAUTION
Make sure to open the valve slowly when exhausting the gas beyond the atmospheric
pressure in order to maintain the pressure of the pump head below an allowable value.
If you open it quickly and widely, the roughing pump may break down.
e. After rough pumping for more than 30 m the valve (V3). inutes, close
Shut off the roughing pump to bring it back to the atmospheric pressure.
f. Adjust the outlet pressure of the regulator at 1.8MPaG. Then open the valve (V2).
Charge helium gas until the pressure gauge on the charging adopter reaches 1.5MPaG
and then close the valve (V2).
g. Start the compressor unit to operate the refrigerator unit.
When operating the refrigerator unit, the helium gas is circulated through the
refrigerator, the flexible hoses, and the charging adopter. See Figure 8-5.
CAUTION
Do not operate the refrigerator unit when it is at a negative pressure. It may cause a
vacuum discharge in the motor of the refrigerator, and bring about a breakdown.
Helium gas charge has to be completed before starting the refrigerator .
ULVAC CRYOGENICS INCORPORATED 8-11