Ulvac CRYO-U12H, Instruction Manual

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Installation
SUPPLY connector of the cryopump.
b. Connect one end of the “RETURN” labeled flexible hose to the helium-gas RETURN
connector on the compressor unit, and connect the other end of the hose to the
RETURN connector of the cryopump.
３．
Check the helium gas pressure on the compressor unit. If the pressure is higher than the
specified value, pull out the helium gas by opening the gas charge valve slowly . If the
pressure is lower than the specified value, charge helium gas as described in Section 8.4 in
this manual.
4.8 Connecting Remote Wiring
For remote operation, a remote wiring is necessary.
Please read the compressor unit instruction manual for the electric machine design
specification concerning the remote operation.
4.9 Connecting Electrical Cables
・ Do not connect the compressor unit power cable until all other connections have been
made between the components and the cryopump system.
WARNING
１． Connect the refrigerator power cable from the compressor unit to the cryopump.
２． Connect the ground.
３． Connect the input power cable from the compressor unit to its power source.
４．
The method of starting the compressor unit different depending on the models. Read the
compressor unit instruction manual for more information.
4-8
ULVAC CRYOGENICS INCORPORATED