Ulvac CRYO-U12H, Instruction Manual

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CRYO-U
®
Cryopump Instruction Manual
ULVAC CRYOGENICS INCORPORATED 4-3
Heat Source
Heat Source
Gate Valve
Elbow Pipe
Cooling
Water
Water
Cooled Baffle
Conduit Pipe
Unusable (
×
)
Usable ( ○ )
Usable ( ○ )
Usable (
○
)
*Install the cryopump not to
face directly to the heat
source.
4.2 Mounting the Cryopump to the Vacuum System
◇
There is no limitation on the pump mounting angle. However, the performance may
slightly change depending on the mounting position (see Table 1-1 in Section 1.2).
◇
If the chamber has any heat source, install cryopump not to face directly to the heat
source. Refer to Figure 4-2 for the recommended mounting locations.
◇
Refer to Figure 4-3 for the recommended maintenance space for cryopump.
◇
Install a main valve between the cryopump and the vacuum chamber.
1. Remove the protective cover from the cryopump.
2. Clean the surface of the flange and insert O-ring or metal gasket.
3. Mount the cryopump to main valve (or the vacuum chamber.)
4. Make sure that all bolts are firmly tightened.
Figure 4-2 Examples of Cryopump Installation