Ulvac CRYO-U12H, Instruction Manual

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Cryopump Description
1-4 ULVAC CRYOGENICS INCORPORATED
◆
Dimensions
The tables below show basic dimensional outline drawings of CRYO-U ® cryopumps. If any
additional information is required, please contact the nearest Customer Support Center.
※
Mounting locations of optional parts such as a thermometer and an accessory flange
may be changed according to your request.
Note: UVG flange is equivalent to VG of JIS standard. (Unit: mm)
【
CRYO-U®12H
】 【
CRYO-U®12HSP
】
UVG-300 10B ANSI
ISO
K DN320
ISO
F DN320
Ａ 236 236 236 236
Ｂ 570.9 570.9 570.9 570.9
Ｃ Φ400 Φ406 Φ370 Φ425
Ｄ Φ304.8 Φ304.8 Φ304.8 Φ304.8
UVG-300 10B ANSI
ISO
K DN320
ISO
F DN320
Ａ 266 266
266 266
Ｂ 600.9 600.9 600.9 600.9
Ｃ Φ400 Φ406 Φ370 Φ425
Ｄ Φ304.8 Φ304.8
Φ304.8 Φ304.8
Figure 1-2 External Drawing of CRYO-U
®
Cryopump (1)
Ｃ
Ａ
Ｄ
35
0
105
105
105 105
350
636
Ｂ
Option
666
Ｂ
Ａ
Ｃ
Ｄ
350
10
5
10
5
105 105
350
Option