56
Appendix C Specifications and Associated Parts
C.1 Stage Specifications
Notes
a
It is recommended that the centre of mass is as close as possible to the stage
b
At mid travel
Parameter
Value
Drive Voltage
-25 V to 150 V
Open Loop Travel Range (-25 V to 150 V)
1100 µm ±10%
Closed Loop Travel Range
800 µm
Feedback Transducer Type
Capacitive
Open Loop Resolution (Theoretical)
2 nm
Closed Loop Resolution (Theoretical)
6 nm
Stiffness
0.1 N/µm ±20%
Pull Force (Increasing Voltage)
55 N ±15%
Push Force (Decreasing Voltage)
45 N ±15%
Resonant Frequency for 15 g Load
Primary: 185 Hz ± 15%
Scondary: 115 Hz ± 15%
Max Load (any direction)
a
300g (0.66 lb)
Accuracy (over 800 µm, closed loop)
±0.06%
Bidirectional Repeatability (over 800 µm, closed loop)
±0.03%
Angular Error (over 800 µm, closed loop)
± 40 µrad
Capacitance
16.0 µF ±15%
Cable Length
2 m (6.6’)
Connector
Male 15-Way Mixed Signal
Combination D-sub
Dimensions (Height
b
, Length, Width)
30 x 130 x 28 mm
Weight (stage only)
Excl. Cable: 180g
Housing Material
Aluminum
