Spectris Particle Measuring Systems Airnet II 301 Operation Manual Download

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Appendix B

Modbus Protocol

Airnet II Particle Sensor Operations Manual

Page B-7

Associated Values for Specific Registry Entries

Table B-5

Associated values for specific registry entries

Device Status
Entries

0x0001

Data Collection

Matches the common coil settings

0x0002

Data Available

0x0004

Data Clear

0x0008

Reset

0x0010

Green Status

0x0020

Red Status

0x0040

External Alarm

0x0080

IEEE Float mode

Device State
Entries (LSByte)

Idle

Sampling

Maintenance

Error

Device SubState
Entries (MSByte)

Idle

n/a

Sampling

n/a

Sampling

Tare

Maintenance

n/a

Maintenance

Calibration

Error n/a

Data Packet Status
Entries

0x0001

Laser Good

0x0002

Flow Good

0x0004

Hardware Good

Summary of Contents for Particle Measuring Systems Airnet II 301

Page 1: ...Airnet II Particle Sensors 301 501 501A 510 510XR 510s 510s XR P N 1000014015 OPERATIONS MANUAL Without measurement there is no control ...

Page 2: ...ance pmeasuring com GERMANY T 49 6151 6671 632 E pmsgermany pmeasuring com ITALY T 39 06 9053 0130 E pmssrl pmeasuring com JAPAN T 81 3 5298 8175 E pmsjapan pmeasuring com KOREA T 82 31 286 5790 E pmskorea pmeasuring com MEXICO T 52 55 2271 5106 E pmsmexico pmeasuring com NORDIC T 45 707 028 55 E pmsnordic pmeasuring com PUERTO RICO T 1 787 718 9096 E pmspuertorico pmeasuring com SINGAPORE T 65 64...

Page 3: ...r written consent of Particle Measuring Systems The information contained in this document is subject to change without notice Quality Statement The Quality Policy of Particle Measuring Systems is to strive to meet or exceed the needs and expectations of our customers and to align the activities of all employees with the common focus of customer satisfaction through continuous improvement in the q...

Page 4: ... Software Support page on www pmeasuring com http www pmeasuring com service and support automated hardware software support WARNING A warning in the text is used to notify the user of the potential for bodily injury or death CAUTION A caution in the text is used to highlight an item that if not done or incorrectly done could damage the instrument and or any materials or devices affected by the in...

Page 5: ...utor s Telephone FAX 39 06 90530130 39 06 9051315 Type of Equipment Particle Monitoring Model No Airnet II 301 501 501A 510 510XR 510s 510s XR I the undersigned hereby declare that the equipment specified above conforms to the above Directive s and Standard s Signature Signature Full Name Scott MacLaughlin Full Name Giovanni Scialo Position Director of Engineering Position Vice President Life Scie...

Page 6: ...roduct Dimensions 1 9 Environmental Conditions 1 11 Chapter 2 Unpacking and Installation 2 1 Unpacking 2 1 Shipping List 2 2 Items You Need to Provide 2 3 Installation 2 3 Automated Laser Power Control 2 4 Detector Board Monitor 2 4 Selecting a Location 2 5 Positioning or Mounting the Unit 2 6 Powering the Sensor from 24 VDC 2 7 Powering the Sensor from Power over Ethernet PoE 2 8 Connecting the P...

Page 7: ...utputs 4 8 Chapter 5 Maintenance and Performance Checks 5 1 Cleaning the Sensor s Housing 5 1 Cable Connectors 5 1 Performance Checks 5 1 Airflow Rate Check 5 1 Background Count Check 5 2 Chapter 6 Troubleshooting 6 1 Troubleshooting Matrix 6 1 Airflow Rate Errors 6 2 Isolating and Repairing Leaks 6 2 Particle Induced Counts 6 3 Transient Induced Counts 6 3 Appendix A TCP IP Protocol A Brief Overv...

Page 8: ...ensor Operations Manual vii AVERTISSEMENT D 1 WARNUNG D 1 ATTENZIONE D 1 ADVERTENCIA D 1 Hazard Symbols D 2 Symboles de risque D 2 Warnschilder D 3 Simboli di pericolo D 3 Simbolos de peligro D 4 Appendix E 㦘㹡㒥㦘䤓䓸德侯 E 1 ...

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Page 10: ... 1 10 Figure 1 7 Wall mounting bracket dimensions 1 10 Chapter 2 Unpacking and Installation 2 1 Figure 2 1 Horizontal Mounting Bracket 2 6 Figure 2 2 S Type Mounting Bracket 2 6 Figure 2 3 L Type Mounting Bracket 2 6 Figure 2 4 Dovetail Mounting Bracket 2 6 Figure 2 5 Stainless Steel wall mounting bracket 2 7 Figure 2 6 24 VDC Power Connector 2 7 Chapter 3 Configuring for Ethernet 3 1 Chapter 4 4 ...

Page 11: ...x Airnet II Particle Sensor Operations Manual Appendix D International Precautions D 1 Appendix E 㦘㹡㒥㦘䤓䓸德侯 E 1 ...

Page 12: ...4 20 mA Signal Configuration Operation 4 1 Table 4 1 Summary of 4 20 mA Channel Thresholds 4 2 Table 4 2 4 20 mA Channel Thresholds 4 2 Table 4 3 4 20 mA Factory Preset Status Levels 4 2 Table 4 4 RS 232 Pinouts RJ 11 Connectors on the Airnet II Particle Sensor 4 3 Table 4 5 Terminal Emulator Communications Parameters 4 4 Table 4 6 Airnet II Particle Sensor 4 20 mA Connector Pins 4 7 Chapter 5 Mai...

Page 13: ...xii Airnet II Particle Sensor Operations Manual Appendix C RJ45 Data Connector Installation C 1 Appendix D International Precautions D 1 Appendix E 㦘㹡㒥㦘䤓䓸德侯 E 1 ...

Page 14: ...automatically shuts off the laser power after 10 seconds of continuous bad flow The laser power is restored after 10 seconds of continuous good flow Airnet II particle sensors communicate by means of Ethernet with Facility Pro and Facility Net1 monitoring system and software packages that store and display particle data and allows the user to control the Airnet II Airnet II models also have the ab...

Page 15: ...Page 1 2 Airnet II Particle Sensor Operations Manual Chapter 1 Getting Started Figure 1 1 Airnet II Models 301 501 510 and 510XR Figure 1 2 Airnet II Models 510s and 510s XR ...

Page 16: ...Airnet or Airnet II particle sensors Tests performed at the Boulder factory allow Particle Measuring Systems to define environments where you can use the Airnet II 510XR and 510s XR particle sensors WARNING This instrument is a Class 1 laser product a Use of controls adjustments or performance of procedures other than those specified here may result in hazardous radiation exposure a National Cente...

Page 17: ...ill normally remain green except for a low flow or laser status error The failure state depends upon how the particle sensor is configured in Facility Net You can set the LED to appear green flashing or dimmed Bottom Airnet II 301 501 501A 510 and 510XR Polycarbonate enclosure version The bottom of the Airnet II unit contains four tapped thread fittings that match the countersunk screw holes on th...

Page 18: ...tion will power the system also RS 232 The RS 232 RJ 11 jack is used for configuring the unit and performing limited diagnostics Vacuum Source The barbed fitting allows a source of house vacuum 12 in Hg for 510 510XR units and 11 in Hg for 301 and 501 501A units to be supplied to the unit Calibration A BNC connector is available for calibrations only and is not used for system operation Optional 4...

Page 19: ...6 Airnet II Particle Sensor Operations Manual Chapter 1 Getting Started Figure 1 3 Airnet II polycarbonate enclosure LEDs and connections Airnet II 301 501 501A 510 510XR Sample Inlet Status and Activity LEDs ...

Page 20: ...onfigured The instrument must be connected to a dedicated Ethernet switch that provides PoE in order to provide the necessary power to the system RS 232 The RS 232 RJ 11 jack is used for configuring the unit and performing limited diagnostics Vacuum Source The barbed fitting allows a source of house vacuum 12 in Hg for 510 510XR units and 11 in Hg for 301 and 501 501A units to be supplied to the u...

Page 21: ...ss protection N A IP65 Flow system External vacuum Vacuum source 11 in Hg 375 mBar below atm pressure 15 in Hg 410 mBar below atm pressure Material chassis Polycarbonate PC Stainless steel 316L Dimensions L x W x H 5 3 x 3 6 x 3 8 in 13 5 x 8 9 x 9 6cm 3 5 x 7 1 x 4 0 8 9 x 17 8 x 10 1 cm Weight 1 6 lb 0 73 kg 2 4 lb 1 08 kg Power 24 VDC 0 5 A 100 240 VAC 10 50 60 Hz Power Supply optional or use o...

Page 22: ...Chapter 1 Getting Started Airnet II Particle Sensor Operations Manual Page 1 9 Product Dimensions Figure 1 5 Airnet II polycarbonate exterior dimensions ...

Page 23: ...Page 1 10 Airnet II Particle Sensor Operations Manual Chapter 1 Getting Started Figure 1 6 Airnet IIs stainless steel exterior dimensions Figure 1 7 Wall mounting bracket dimensions ...

Page 24: ...itude 6 562 ft 2000 m Installation requirements Indoor use only Pollution degree 2 Over voltage category I Ordinary protection The polycarbonate enclosure version is not protected against harmful ingress of moisture External AC to DC Power Supply Over voltage Category II Class I Equipment Electrical earth ground from the mains power source to the product input is required for safety Ingress protec...

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Page 26: ...e that all components listed in the following section are included and inspect each unit for any damage 3 If any components are damaged immediately notify the shipper and Particle Measuring Systems 4 After you have determined that the shipment is undamaged store the packing materials for future shipping needs Warranties may not apply if return shipping containers are inadequate ...

Page 27: ...le units Particle Measuring Systems may elect to limit the number of Operations Manuals included in the shipment 1 Universal AC to DC power supply 100 240 VAC 50 60 Hz Optional 1 Power connectors and Molex pins Molex 6 pin square receptacle 1 Molex crimp pins female 6 6 4 20 mA output connectors Optional Molex Micro Fit 3 0 6 pin square receptacle optional 1 Molex crimp pins female 6 optional 6 Ta...

Page 28: ...instructions are included to guide you through the installation process Please pay close attention to the NOTE CAUTION and WARNING text Installation includes the following steps Selecting an Appropriate Location Positioning or Mounting the Unit Connecting the Power Supply 24 VDC power supply or PoE power Connecting a Communications Cable Connecting Sample Tubing or Sample Probe as applicable Attac...

Page 29: ...cle counts being detected for an extended period of time If a detector board fails and indicates no counts this could be similar to not having any particle counts being measured To address this unlikely but possible failure mode a monitoring algorithm is used to indicate a detector board failure If a failure occurs it will be indicated within a certain amount of time depending upon the type of ins...

Page 30: ...ld be of sufficient strength to support the unit safely Vacuum and purge tubing The unit should be located near appropriate sources of vacuum and purge gas if necessary Cables The unit should be located near a source of grounded electrical power an Ethernet port and any other devices it must communicate with Cables should reach from the unit to the connector without strain Environmental conditions...

Page 31: ...nsor is attached to a chosen surface with one of the following four types of mounting bracket A horizontal mounting bracket for attaching to a horizontal surface Polycarbonate enclosure version only An S shaped mounting bracket for attachment to a horizontal surface Polycarbonate enclosure version only An L shaped mounting bracket for attachment to a vertical surface A dovetail mounting bracket fo...

Page 32: ...powered with sources other than the optional power supply The unit may also be powered using a source of 24 VDC power that may be connected to multiple Airnet II particle sensors Ensure that the 24 VDC supply wiring is sized 18 AWG 0 75 mm2 minimum and the supply is current limited to 8 A maximum or fused at 5A maximum If using a local power source a receptacle and crimp pins are available that at...

Page 33: ...wer supply are all right the unit may be faulty The Airnet II also has the capability of being powered through Power over Ethernet This requires the use of an internet hub designed to operate with such systems As well as the use of a CAT5 shielded cable or grounding the Airnet II particle sensor locally Connecting the Sample and Vacuum Tubing The plumbing connections are the following Sample inlet...

Page 34: ...cations settings that will enable the Airnet II particle sensor to communicate with FacilityPro or Facility Net by means of an Ethernet network Sensors to be used to communicate in Modbus must be configured for proper operation see Appendix B Modbus Protocol When to Configure the Sensor IfitwillbedifficultorimpossibletotakeacomputertotheAirnetIIparticlesensorafter installation it should be configu...

Page 35: ...ovided in your shipment The wiring for this cable is as follows NOTE Microsoft Windows includes a terminal emulator called HyperTerminal Other terminal emulator programs are widely available Your IT administrator or microcomputer support person may be able to provide assistance Table 3 1 RS 232 Pin Outs RJ 11 jack Pin 1 DSR Pin 2 Transmit Pin 3 Receive Pin 4 RTS Pin 5 CTS Pin 6 GND NOTE Pins 1 4 a...

Page 36: ...established with the unit a prompt appears Enter the Configuration commands see Configuration Commands below to set the following addresses 4 Set the IP address 5 Set the multicast address 6 Set the mask address 7 Set the gateway address 8 Enter the write command CAUTION As with any network capable software do not attempt to connect the Airnet II particle sensor to a network without your network a...

Page 37: ...ries is a value of 0 255 separated by a period character The mask separates the network address from the host address This address is common to all devices on the logical network Usually the mask will be similar to 255 255 255 000 Your network administrator will tell you if you need to enter this field Set mul ticast aaa bbb ccc ddd The multicast address must be set when using Facility Net This co...

Page 38: ...de where there is no data queue the unit reboots when disconnected and parameters specific to batch processing are enabled Set mode x The unit will run under one of two possible operational modes PMS Operational Mode or Modbus Mode When shipped from the factory the unit is in the PMS Operational Mode When the value of x is set to zero 0 the unit will reboot into the PMS Operational Mode When the v...

Page 39: ...ensor Operations Manual Chapter 3 Configuring for Ethernet TCP IP Settings for the Airnet II particle sensor Unit Serial Number Date Software Version Set By MAC Address IP Address Multicast Address Net Mask Address Gateway Address ...

Page 40: ...cting the Ethernet Cable The Airnet II particle sensor communicates with FacilityPro or Facility Net software by means of a CAT 5 UTP Ethernet cable The sensor is designed to work best with a CAT 5 UTP cable Other types of Ethernet cable may produce excess noise Your Information Systems Manager Network Administrator or other appropriate computer support personnel may be able to assist in procuring...

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Page 42: ...st be installed in the Airnet II One signal communicates instrument status and the other two signals transmit particle count data from two channels This data is typically collected and processed by a SCADA system NOTE The following chapter only applies to Airnet II 301 501 501A 510 and 510 XR Polycarbonate enclosure version NOTE The Airnet II particle sensor can output data to Facility Net softwar...

Page 43: ...nd of the sensor The signals are output through a 6 pin Mini Fit Jr connector plug located on the sensor s rear panel Table 4 1 Summary of 4 20 mA Channel Thresholds First signal output Channel 1 particle counts Second signal output Channel 2 particle counts Third signal output Instrument status Table 4 2 4 20 mA Channel Thresholds Channel 301 501 501A 510 510XR 1 0 3 µm 0 5 µm 0 5 µm 0 5 µm 0 5 µ...

Page 44: ... and Software Computer loaded with HyperTerminal or other terminal emulation software RS 232 configuration cable provided in your shipment Wiring for this cable is as follows NOTE The following information assumes that the operator has a working knowledge of terminal emulation software such as HyperTerminal Table 4 4 RS 232 Pinouts RJ 11 Connectors on the Airnet II Particle Sensor Pin 1 DSR Pin 2 ...

Page 45: ...roceed to the COM1 parameters dialog box 4 Set the following communications parameters and press Enter A prompt will appears on the computer display 5 At the prompt enter the appropriate commands to set the parameters for your 4 20mAapplication Recordyourparametersforfuturereference Alistofavailable commands are described in the following section Table 4 5 Terminal Emulator Communications Paramete...

Page 46: ...t interface is replaced by the value in permanent memory When the 4 20 mA option is used it always runs by the first sample interval set cumul n This function selects between cumulative and differential data for the first two configurable 4 20 mA outputs if that option is available If n equals 1 the data is cumulative and represents the number of particles detected that are larger than the size sp...

Page 47: ...plies to channel 1 The second n applies to channel 2 write Saves the most recent changes You must send this command after completing the instrument setup or your parameters will be lost when the sensor is de energized Viewing Configuration Settings Typing sta tus and then pressing the Enter key results in a display of the Airnet II particle sensor s configuration settings software version and conn...

Page 48: ... connector plug located on the rear of the sensor The following pins are used on the connector 1 Connect the cable from the Airnet II particle sensor s 4 20 mA output to the data collection system s input 2 Set up the data collection system to correctly interpret the sensor s 4 20 mA output Table 4 6 Airnet II Particle Sensor 4 20 mA Connector Pins Pin Function 1 Current output for Channel 1 Instr...

Page 49: ...to be adjusted Output Channels 1 3 are indexed 0 2 The offset and scale factors for the selected output will be set to 0 and 1 respectively 3 The sensor will then apply 4 mA to the selected output The operator will be prompted to enter the actual reading as measured by the current meter The unit will automatically calculate the appropriate offset factor to be applied to that output 4 The sensor wi...

Page 50: ...cleanser Cable Connectors Occasionally a cable connector may be damaged through an accident The RS 232 and UTP Ethernet connections are somewhat fragile If a connector is damaged be careful not to aggravate the problem by forcing a cable into a damaged connector A Particle Measuring Systems Service Representative can repair or replace damaged connectors Performance Checks Complete the following pr...

Page 51: ...by power line transients cosmic ray particles or RFI or EMI noise counts Externally induced counts are the exception the only way to verify externally induced counts is to perform this procedure To perform this procedure you will need an absolute filter rated at less than 0 2 micron effective to 0 1 micron in air To perform a background count check 1 Locate the Airnet II particle sensor to where i...

Page 52: ...for power including any power strips or surge protectors Power supply faulty Try a different power supply If using PoE Verify power is being supplied Communications not established Facility Net displays Communications Error Unable to view data from working sensor Ethernet cable problem Replace the Ethernet cable that connects the sensor to an Ethernet hub Unit not configured correctly Re configure...

Page 53: ...s required for the 301 and 501 501A units to provide the sample flowrate If the flowrate is still low after determining that there is sufficient vacuum perform the following procedure Isolating and Repairing Leaks To isolate and repair leaks 1 Remove the top and bottom halves of the instrument 2 Run samples 3 While a sample is running use a bulb syringe to blow a small amount of smoke around the p...

Page 54: ...oth the isokinetic sampling horn and jet and flush both with a cleaning solvent alcohol acetone and so on 2 Dry the isokinetic sampling horn and the jet using clean pressurized air 3 Replace the jet and horn Make sure to line up the alignment indicators Transient Induced Counts Line transients RFI or EMI noise counts are generally subtle and unique to a certain installation If these counts are sus...

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Page 56: ... main functions are Provide the basic unit for data transfer Addressing Routing Fragmentation of datagrams Ping TCP IP systems can use a utility named PING Packet InterNet Groper to test station and network integrity The TCP IP 32 add on protocol for Microsoft Windows for Workgroups 3 11 includes a PING function that must be run from a Windows DOS window To use the Windows TCP IP PING 1 With Windo...

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Page 58: ...es These values can be interpreted as integer representations of floating point numberswithafixedscalingfactororasIEEE 754floatingpointrepresentationsofthat value Refer to the register map to determine which register pairs have this feature applied This setting can be made in the setup interface and saved in non volatile storage or set real time via a coil 1 Input registers Read only information f...

Page 59: ...s all the Coil bits for convenience The host can use this to check for data availability for example The Device State register is a single register in which the LSByte is a state value and the MSByte is an associated sub state value The time stamp set of registers is a time_t value The Data Packet Status is two registers for growth 3 bits are used Flow Rate and Volume are in CF These can be read e...

Page 60: ...0019 ushort Channel 2 Size high nanometers 30020 ushort Channel 2 Size low nanometers Type Table B 2 Input register data packet Input Registers Description Data Packet Comment Notes 30201 ushort Calibration Date Month Calibration Date 30202 ushort Calibration Date Day Calibration Date 30203 ushort Calibration Date Year Calibration Date 30204 string Serial Number Char 00 01 Serial Number 30205 stri...

Page 61: ...fm Float Mode 30223 ushort Flow Rate low Flow 10 Scale cfm Float Mode 30224 ushort Volume high Volume 10 Scale cf Float Mode 30225 ushort Volume low Volume 10 Scale cf Float Mode 30226 ushort Location Location value n a 30227 ushort Number Particle Channels Variable across types 2 30228 ushort Number Analog Channels Variable across types 0 30229 ushort Particle Channel 1 high Cumulative Raw Ch1 30...

Page 62: ...rt a sequence of samples if the repeat count has been set Read Write 1 Sampling Enabled 0 Sampling Disabled 2 The data available coil is used to both inform the host that data is now available and to delete the next queued data packet if desired Read 1 Data Available 0 No Data Available Write 0 Delete queued data element 3 The data clear coil will delete all data in the queue Write 1 Delete all qu...

Page 63: ...ince the queue is circular the next sample will replace the single one in the queue Queued data will always be available even when not sampling If there is no data available the input registers will yield zeros This is done instead of generating an execution exception so that the customer can simply read the data packet along with the Device Status in one command Table B 4 Coils Coils Description ...

Page 64: ...the common coil settings 0x0002 Data Available 0x0004 Data Clear 0x0008 Reset 0x0010 Green Status 0x0020 Red Status 0x0040 External Alarm 0x0080 IEEE Float mode Device State Entries LSByte 0 Idle 1 Sampling 2 Maintenance 3 Error Device SubState Entries MSByte 0 Idle n a 0 Sampling n a 1 Sampling Tare 0 Maintenance n a 1 Maintenance Calibration 0 Error n a Data Packet Status Entries 0x0001 Laser Go...

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Page 66: ... 732 901 9608 Fax 81 3 5411 2827 Fax 49 8131 28 08 30 www neutrik com Draft Nr Date BDA 100 3102M0861 19 09 2002 Remove the cover if present Slide the bushing over the connector onto the cable Put the opened boot on the cable Put chuck onto the cable Press the adapter into the port Position the ring on the cable end flush to the face Slide the connector into the housing Slide the chuck in the hous...

Page 67: ...Page C 2 Airnet II Particle Sensor Operations Manual Appendix C RJ45 Data Connector Installation This page is intentionally left blank ...

Page 68: ... Laserprodukt der Klasse 1 welches den Normen US 21 CFR 1040 10 und EN 60825 1 entspricht Das Justieren der Lasereinheit das Verändern des Gerätes oder Einsatzbereiche die nicht den Vorgaben dieser Anleitung für das Gerät entsprechen können dazu führen dass gefährliches Laserlicht austritt ATTENZIONE Lo strumento è classificato come prodotto laser di Classe 1e rispetta l US 21 CFR 1040 10 e l EN 6...

Page 69: ...Des symboles représentant les risques sont placés sur l appareil Leur signification est la suivante Symbol Nature of Hazard Attention consult accompanying documents Dangerous High Voltage Warning Laser radiation Avoid exposure to beam Symbole Nature du risque Attention consulter les documents d accompagnement Danger Electricite Avertissement Rayonnementlaser Éviter toute exposition au faisceau ...

Page 70: ...i pericolo Il significato dei simboli di pericolo che appaiono sugli strumenti il seguente Symbol Gefahrenart Achtung In den beiliegenden Unterlagen nachschlagen Achtung Hochspannung Warnung Laserstrahlung Nicht in den Strahl blicken Simbolo Natura del pericolo Attenzione Consultare i documenti allegati Tensione Pericolosa Avvertenza Radiazione laser Evitare l esposizione ai raggi ...

Page 71: ...dix D International Precautions Simbolos de peligro Los simbolos de peligro que aparecen en el equipo significan Símbolo Naturaleza del Peligro Atención consultar los documentos adjuntos Peligro alto voltaje Advertencia Radiación láser Evite exponerse al rayo ...

Page 72: ...德侯 Part Name 捷ↅ 䱿㦘㹡㒥㦘䤓䓸德侯杔 Pb 㻭 Hg 柘 Cd ↆ杻 Cr VI 䅃勣啾 PBB 䅃勣啾搩 PBDE 䟄䄟ㄣ X O X O O O Ⓠ䟄恾孔揜 X O X O O O ⷵ ↅ X O X O O O 䉏 X O X O O O 㧉㬿捷ↅ X O X O O O 䟄冕 X O X O O O O 嫷䯉䞷ℝ捷ↅ䤓㓏㦘㡞䓸德㓏䤓㦘㹡㒥㦘䓸德 ℝSJ T11363 2006屓䤓棟 ㄵ尐㻑ᇭ X 嫷䯉䞷ℝ捷ↅ䤓咂䱜㡞䓸德㓏䤓㦘㹡㒥㦘䓸德浧ℝSJ T11363 2006屓䤓棟ㄵ尐㻑ᇭ ...

Page 73: ...Page E 2 Airnet II Particle Sensor Operations Manual Appendix E 㦘㹡㒥㦘䤓䓸德侯 This page is intentionally left blank ...

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