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SMC Networks XGT312-50336 Series, Operation Manual

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SMC Networks XGT312-50336 Series Operation Manual Download Page 7

 

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3. Construction / Operation 

3-1 Construction 
 

Summary of Contents for XGT312-50336 Series

Page 1: ...Doc no GV OMH0003 C PRODUCT NAME High Vacuum Slit Valve MODEL Series Product Number XGT312 50336 XGT313 50336 B...

Page 2: ...nstructions 2 to 3 1 Specifications 4 2 How to order 5 3 Construction Operation 6 to 8 4 Precautions 9 to 10 5 Replacement Part List 11 6 Maintenance 12 7 Troubleshooting 12 Attachment Procedure for M...

Page 3: ...ipment failure when configuring the equipment 2 Only personnel with appropriate training should operate machinery and equipment The product specified here may become unsafe if handled incorrectly The...

Page 4: ...lure of the product 3 Prior to using SMC products please read and understand the warranty terms and disclaimers noted in the specified catalog for the particular products 2 Vacuum pads are excluded fr...

Page 5: ...O C 5 to 150 for gate 5 to 60 for moving part Operating fluid Inertia vacuum Operating times s 0 6 to 1 2 Position detection Auto switch D A93 Main materials for vacuum part Seal material FKM Material...

Page 6: ...f MESC Cassette The number of axes and sealing type 1 axes and bellows Valve size 3 for 300mm wafer Model of high vacuum slit valve Auto switch and connector Symbol Auto switch Connector NIL Not provi...

Page 7: ...6 3 Construction Operation 3 1 Construction...

Page 8: ...y an O ring 3 2 2 Closing gate Figure 2A to Figure 2B The roller block integrated with the piston rod moves up when pressure is applied to CLOSE side of pressure piping in other words pressure is exha...

Page 9: ...ght around the roller bearing A whose position is fixed by the fulcrum groove and the gate stops clamping At this time the roller bearing B held to the lever and the plate 27 held to the roller block...

Page 10: ...ocking valve with no operating pressure applied first apply pressure to operating port which can remain the gate at open or close position as the gate is at the moment and then release end lock and sw...

Page 11: ...ating part Touching moving part with hands during operation may cause injury 5 Please exhaust all pressure in cylinder with disconnecting air piping on operating part at valve maintenance 4 7 Replacem...

Page 12: ...336 C XGT311 50336A1 1F For XGT31 50336 F Gate ASSY XGT300 2 1S Body O ring FKM XGT300 9 10S AS568 273 Gate O ring FKM XGT300 9 9S For XGT31 50336 1 AS568 271 Kalrez 4079 XGT300 9 11S For XGT31 50336...

Page 13: ...eplace bonnet ASSY External leakage Breakage of bellows Replace bellows O ring deterioration caused by process Replace it to the O ring with appropriate material Flaws on seat surface Polish seat surf...

Page 14: ...13 C...

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Page 17: ...ember 2021 4 14 1 Sotokanda Chiyoda ku Tokyo 101 0021 JAPAN Tel 81 3 5207 8249 Fax 81 3 5298 5362 URL http www smcworld com Note Specifications are subject to change without prior notice and any oblig...

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