SMC Networks XGT312-50336 Series, Operation Manual

Page: 13 / 17

- 12 -
6
．
Maintenance
Please refer to valve maintenance procedure in the attached documents.
7
．
Troubleshooting
Condition Assumed cause Countermeasure
Gate
Internal leakage
Operating pressure is low
Pressure should be 0.45MPa or
more.
Lowering of air pressure
(Working of end lock) Air leaks over specified value while
end lock is working
Flaws on gate seal Replace gate
Flaws on seal on chamber side Polish or replace Body
Deterioration of O-ring by
processing
Replace with new O-ring whose
material is changed to have
compatibility with processing
O-ring twisted Remove and mount O-ring again
Deflection of O-ring
Put deflected part into dovetail
groove equally
Deterioration of bonnet ASSY Replace bonnet ASSY
External leakage
Breakage of bellows Replace bellows
O-ring deterioration caused by
process Replace it to the O-ring with
appropriate material
Flaws on seat surface Polish seat surface
Gate doesn
’t close
Operation of end lock See Precaution 4-3
Operating pressure is low It should be 0.45MPa or more
Deterioration of bonnet ASSY Replace bonnet ASSY
Gate doesn
’t open
Operation of end lock See Precaution 4-3
Operating pressure is low It should be 0.45MPa or more
Deterioration of bonnet ASSY Replace bonnet ASSY
Switch doesn
’t
operate
Incorrect position of switch Adjust it to the appropriate position
Operation failure of switch Replace switch
Air leakage of
bonnet ASSY
Looseness of connection Replace bonnet ASSY
Wearing of piston packing Replace bonnet ASSY
Please contact to SMC, because the disassembly of it is necessary for the exchange of
the bellow.
B
B
B
A