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1. Specifications
Opening angle
50mm×336mm
Working pressure Pa
Atmospheric pressure to 10
-6
Operating pressure MPa
0.45 to 0.6
Internal leakage amount
O-ring material : FKM
6.5×10
-10
Pa
・
m
3
/sec
O-ring material : Kalrez
6.5×10
-9
Pa
・
m
3
/sec
Internal leakage amount
(At negative pressure 0.1MPa or less)
O-ring material : FKM
6.5×10
-8
Pa
・
m
3
/sec
O-ring material : Kalrez
6.5×10
-7
Pa
・
m
3
/sec
External leakage amount
6.5×10
-11
Pa
・
m
3
/sec
Operating temperature
O
C
5 to 150 (for gate) 5 to 60 (for moving part)
Operating fluid
Inertia vacuum
Operating times s
0.6 to 1
2
Position detection
Auto switch (D-A93)
Main
materials
for vacuum part
Seal material
FKM
Material for
mechanism
Bellows : AM350, Gate : A6063, Body : A5052P,
Bonnet : A5052, Others : SUS304
Piping size
Rc1/8
Exhaust direction
Universal
Mounting direction
Vertical
End lock mechanism
With end lock (No seal function at gate closed)
Cylinder capacity l
0.2
Mass kg
20
1: At normal temperature
・
Gas penetration is not included.
2: The period of time from gate open state to clamp after signal comes to solenoid valve and from
gate clamp state to gate open.
B
C
C
Summary of Contents for XGT312-50336 Series
Page 7: ...6 3 Construction Operation 3 1 Construction...
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