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  SLIT VALVE 

       

  Safety Instructions

 

 

These safety instructions are intended to prevent hazardous situations and/or equipment damage.

 

These instructions indicate the level of potential hazard with the labels of “Caution,” “Warning” or “Danger.”

 

They  are  all  important  notes  for  safety  and  must  be  followed  in  addition  to  International  Standards 
(ISO/IEC)

*1)

 , and other safety regulations.

 

*1) ISO 4414: Pneumatic fluid power -- General rules relating to systems.

 

   

ISO 4413: Hydraulic fluid power -- General rules relating to systems.

 

   

IEC 60204-1: Safety of machinery -- Electrical equipment of machines .(Part 1: General requirements)

 

   

ISO 10218: Manipulating industrial robots -Safety.

                                                                                 

 

 

  etc.

 

     

 
 

Caution

 

Caution

 indicates a hazard with a low level of risk which, if not avoided, could result 

in minor or moderate injury.

 

 
 

Warning

 

Warning

 

indicates a hazard with a medium level of risk which, if not avoided, could 

result in death or serious injury.

 

 
 

Danger

 

Danger

 

indicates a hazard with a high level of risk which, if not avoided, will result 

in death or serious injury.

 

 

Warning

 

1. The compatibility of the product is the responsibility of the person who designs the equipment or 

decides its specifications.

 

Since  the  product  specified  here  is  used  under  various  operating  conditions,  its  compatibility  with  specific 
equipment must be decided by the person who designs the equipment or decides its specifications based on 
necessary analysis and test results.   
The expected performance and safety assurance of the equipment will be the responsibility of the person who 
has determined its compatibility with the product.   
This  person  should  also  continuously  review  all  specifications  of  the  product  referring  to  its  latest  catalog 
information, with a view to giving due consideration to any possibility of equipment failure when configuring the 
equipment.

 

2. Only personnel with appropriate training should operate machinery and equipment.

 

The product specified here may become unsafe if handled incorrectly.

 

The  assembly,  operation  and  maintenance  of  machines  or  equipment  including  our  products  must  be 
performed by an operator who is appropriately trained and experienced.

 

3. Do not service or attempt to remove product and machinery/equipment until safety is confirmed.

 

1.The inspection and maintenance of machinery/equipment should only be performed after measures to   

prevent falling or runaway of the driven objects have been confirmed.

 

2.When the product is to be removed, confirm that the safety measures as mentioned above are implemented 
    and the power from any appropriate source is cut, and read and understand the specific product precautions 
    of all relevant products carefully.

 

3. Before machinery/equipment is restarted, take measures to prevent unexpected operation and malfunction.

 

4. Contact SMC beforehand and take special consideration of safety measures if the product is to 

be used in any of the following conditions.

 

1. Conditions and environments outside of the given specifications, or use outdoors or in a place exposed to 
    direct sunlight.

 

2. Installation on equipment in conjunction with atomic energy, railways, air navigation, space, shipping, 

  vehicles, military, medical treatment, combustion and recreation, or equipment in contact with food and 
  beverages, emergency stop circuits, clutch and brake circuits in press applications, safety equipment or 
  other applications unsuitable for the standard specifications described in the product catalog.

 

3. An application which could have negative effects on people, property, or animals requiring special safety   

analysis.

 

4.Use  in  an  interlock  circuit,  which  requires  the  provision  of  double  interlock  for  possible  failure  by  using  a 

mechanical protective function, and periodical checks to confirm proper operation. 

 

 

Summary of Contents for XGT312-50336 Series

Page 1: ...Doc no GV OMH0003 C PRODUCT NAME High Vacuum Slit Valve MODEL Series Product Number XGT312 50336 XGT313 50336 B...

Page 2: ...nstructions 2 to 3 1 Specifications 4 2 How to order 5 3 Construction Operation 6 to 8 4 Precautions 9 to 10 5 Replacement Part List 11 6 Maintenance 12 7 Troubleshooting 12 Attachment Procedure for M...

Page 3: ...ipment failure when configuring the equipment 2 Only personnel with appropriate training should operate machinery and equipment The product specified here may become unsafe if handled incorrectly The...

Page 4: ...lure of the product 3 Prior to using SMC products please read and understand the warranty terms and disclaimers noted in the specified catalog for the particular products 2 Vacuum pads are excluded fr...

Page 5: ...O C 5 to 150 for gate 5 to 60 for moving part Operating fluid Inertia vacuum Operating times s 0 6 to 1 2 Position detection Auto switch D A93 Main materials for vacuum part Seal material FKM Material...

Page 6: ...f MESC Cassette The number of axes and sealing type 1 axes and bellows Valve size 3 for 300mm wafer Model of high vacuum slit valve Auto switch and connector Symbol Auto switch Connector NIL Not provi...

Page 7: ...6 3 Construction Operation 3 1 Construction...

Page 8: ...y an O ring 3 2 2 Closing gate Figure 2A to Figure 2B The roller block integrated with the piston rod moves up when pressure is applied to CLOSE side of pressure piping in other words pressure is exha...

Page 9: ...ght around the roller bearing A whose position is fixed by the fulcrum groove and the gate stops clamping At this time the roller bearing B held to the lever and the plate 27 held to the roller block...

Page 10: ...ocking valve with no operating pressure applied first apply pressure to operating port which can remain the gate at open or close position as the gate is at the moment and then release end lock and sw...

Page 11: ...ating part Touching moving part with hands during operation may cause injury 5 Please exhaust all pressure in cylinder with disconnecting air piping on operating part at valve maintenance 4 7 Replacem...

Page 12: ...336 C XGT311 50336A1 1F For XGT31 50336 F Gate ASSY XGT300 2 1S Body O ring FKM XGT300 9 10S AS568 273 Gate O ring FKM XGT300 9 9S For XGT31 50336 1 AS568 271 Kalrez 4079 XGT300 9 11S For XGT31 50336...

Page 13: ...eplace bonnet ASSY External leakage Breakage of bellows Replace bellows O ring deterioration caused by process Replace it to the O ring with appropriate material Flaws on seat surface Polish seat surf...

Page 14: ...13 C...

Page 15: ...14...

Page 16: ...15...

Page 17: ...ember 2021 4 14 1 Sotokanda Chiyoda ku Tokyo 101 0021 JAPAN Tel 81 3 5207 8249 Fax 81 3 5298 5362 URL http www smcworld com Note Specifications are subject to change without prior notice and any oblig...

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