background image

 

- 8 - 

 

3-2-3 Clamping (Sealing) (Figure 2B to Figure 2C) 
  The roller bearing A 

  gets into the fulcrum groove 

  and makes the lever 

, the shaft 

 

and  the  gate 

  stop.  On  the  other  hand,  as  the  piston  rod 

  and  the  roller  block 

  rise 

further  overcoming  force  of  spring 

,  the  roller  bearing  B 

  moves  right  along  with  the  cam 

groove 

  of the roller block 

. Because of this, the shaft 

  and the gate 

  lean left around 

the  roller  bearing  A 

  whose  position  is  fixed  by  the  fulcrum  groove 

  and  the  gate 

 

clamps an O-ring 

  to the seating face 

  for sealing. The lever 

  fixed in lateral and vertical 

position  leans  when  the  plate 

27

  moves  up  and  makes  the  guide  pin 

  of  the  lever 

 

unengaged  from  the  guide  groove 

  of  the  plate 

27

.  Because  of  this,  the  lateral  position  is 

made unfixed. 
 
3-2-4 Clamp release (Figure 2C to Figure 2B) 

Since the roller block 

 

is moved down when pressure is applied to “OPEN” side of pressure 

piping (in other words, pressure i

s exhausted from “CLOSE” side of pressure piping), the roller 

bearing  B 

  moves  left  along  with the cam groove 

.  Because  of this,  the  shaft 

  and  the 

gate 

  lean right around the roller bearing A 

  whose position is fixed by the fulcrum groove 

,  and  the  gate 

  stops  clamping.  At  this  time,  the  roller  bearing  B 

  held  to  the  lever 

 

and the plate 

27

  held to the roller block 

  come to touch each other and are fixed vertically by 

force of spring 

  and fixed laterally when the guide pin 

  held to the lever 

  is engaged into 

the guide groove 

  of the plate 

27

When the roller block 

  moves down, the lever 

  is given slight force to move down by the 

roller bearing B 

, but the force of spring 

  overcomes the force to move down and makes the 

gate 

  away perpendicularly from the seat plate 

 
3-2-5 Opening gate (Figure 2B to Figure 2A) 

After the gate stops clamping (sealing), the gate 

, the shaft 

, the lever 

  and the roller 

block 

  move down simultaneously. And the gate 

  opens and makes the slit 

23

  of the body 

21

  able to transfer workload. 

 
3-2-6 End lock (Not shown in Figure) 
  In  the  case  of  sudden  loss  of  operating  pressure  while  the  gate 

  is  in  the  opened  or  closed 

position, a pin 

  of end lock extends out and comes into an end lock groove 

24

  of the actuating   

base 

22

. Because of this, the movement of the piston rod 

  is restricted and the valve is held at 

the  position  before  sudden  loss  of  operating  pressure.  (The  gate  is  not  held  sealed  during 
clamping.) 

Summary of Contents for XGT312-50336 Series

Page 1: ...Doc no GV OMH0003 C PRODUCT NAME High Vacuum Slit Valve MODEL Series Product Number XGT312 50336 XGT313 50336 B...

Page 2: ...nstructions 2 to 3 1 Specifications 4 2 How to order 5 3 Construction Operation 6 to 8 4 Precautions 9 to 10 5 Replacement Part List 11 6 Maintenance 12 7 Troubleshooting 12 Attachment Procedure for M...

Page 3: ...ipment failure when configuring the equipment 2 Only personnel with appropriate training should operate machinery and equipment The product specified here may become unsafe if handled incorrectly The...

Page 4: ...lure of the product 3 Prior to using SMC products please read and understand the warranty terms and disclaimers noted in the specified catalog for the particular products 2 Vacuum pads are excluded fr...

Page 5: ...O C 5 to 150 for gate 5 to 60 for moving part Operating fluid Inertia vacuum Operating times s 0 6 to 1 2 Position detection Auto switch D A93 Main materials for vacuum part Seal material FKM Material...

Page 6: ...f MESC Cassette The number of axes and sealing type 1 axes and bellows Valve size 3 for 300mm wafer Model of high vacuum slit valve Auto switch and connector Symbol Auto switch Connector NIL Not provi...

Page 7: ...6 3 Construction Operation 3 1 Construction...

Page 8: ...y an O ring 3 2 2 Closing gate Figure 2A to Figure 2B The roller block integrated with the piston rod moves up when pressure is applied to CLOSE side of pressure piping in other words pressure is exha...

Page 9: ...ght around the roller bearing A whose position is fixed by the fulcrum groove and the gate stops clamping At this time the roller bearing B held to the lever and the plate 27 held to the roller block...

Page 10: ...ocking valve with no operating pressure applied first apply pressure to operating port which can remain the gate at open or close position as the gate is at the moment and then release end lock and sw...

Page 11: ...ating part Touching moving part with hands during operation may cause injury 5 Please exhaust all pressure in cylinder with disconnecting air piping on operating part at valve maintenance 4 7 Replacem...

Page 12: ...336 C XGT311 50336A1 1F For XGT31 50336 F Gate ASSY XGT300 2 1S Body O ring FKM XGT300 9 10S AS568 273 Gate O ring FKM XGT300 9 9S For XGT31 50336 1 AS568 271 Kalrez 4079 XGT300 9 11S For XGT31 50336...

Page 13: ...eplace bonnet ASSY External leakage Breakage of bellows Replace bellows O ring deterioration caused by process Replace it to the O ring with appropriate material Flaws on seat surface Polish seat surf...

Page 14: ...13 C...

Page 15: ...14...

Page 16: ...15...

Page 17: ...ember 2021 4 14 1 Sotokanda Chiyoda ku Tokyo 101 0021 JAPAN Tel 81 3 5207 8249 Fax 81 3 5298 5362 URL http www smcworld com Note Specifications are subject to change without prior notice and any oblig...

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