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SLIT VALVE 
Safety Instructions

 

 
 

Caution

 

The product is provided for use in manufacturing industries.   

The product herein described is basically provided for peaceful use in manufacturing industries.   

If  considering  using  the  product  in  other  industries,  consult  SMC  beforehand  and  exchange 
specifications or a contract if necessary.   

If anything is unclear, contact your nearest sales branch.

 

 

Limited warranty and Disclaimer/Compliance Requirements

 

The  product  used  is  subject  to  the  following  “Limited  warranty  and  Disclaimer”  and  “Compliance 
Requirements”.

 

Read and accept them before using the product.

 

 

Limited warranty and Disclaimer                                                                           

 

1.The  warranty  period  of  the  product  is  1  year  in  service  or  1.5  years  after  the  product  is 

delivered,whichever is first.

2) 

Also, the product may have specified durability, running distance or replacement parts. Please 
consult your nearest sales branch.

 

2. For any failure or damage reported within the warranty period which is clearly our responsibility, 

  a replacement product or necessary parts will be provided.

 

This limited warranty applies only to our product independently, and not to any other damage 

  incurred due to the failure of the product.

 

3. Prior to using SMC products, please read and understand the warranty terms and disclaimers   

noted in the specified catalog for the particular products.

 

 

2) 

Vacuum pads are excluded from this 1 year warranty.

 

      

A vacuum pad is a consumable part, so it is warranted for a year after it is delivered.

 

Also, even within the warranty period, the wear of a product due to the use of the vacuum 

pad or failure due to the deterioration of rubber material are not covered by the limited 

  warranty.

 

 

Compliance Requirements

 

1.  The use of SMC products with production equipment for the manufacture of weapons of mass 

destruction(WMD) or any other weapon is strictly prohibited. 

2.  The exports of SMC products or technology from one country to another are  governed by the 

relevant security laws and regulation of the countries involved in the transaction. Prior to the 
shipment of a SMC product to another country, assure that all local rules governing that export 
are known and followed. 

 

 

Caution

 

SMC products are not intended for use as instruments for legal metrology. 

Measurement instruments that SMC manufactures or sells have not been qualified by type approval tests 
relevant to the metrology (measurement) laws of each country.   
Therefore,  SMC  products  cannot  be  used  for  business  or  certification  ordained  by  the  metrology 

(measurement) laws of each country.

 

 

 

Caution

 

SMC products are not intended for use as instruments for legal metrology. 

Measurement instruments that SMC manufactures or sells have not been qualified by type approval tests 
relevant to the metrology (measurement) laws of each country.   
Therefore,  SMC  products  cannot  be  used  for  business  or  certification  ordained  by  the  metrology 
(measurement) laws of each country. 

 

Summary of Contents for XGT312-50336 Series

Page 1: ...Doc no GV OMH0003 C PRODUCT NAME High Vacuum Slit Valve MODEL Series Product Number XGT312 50336 XGT313 50336 B...

Page 2: ...nstructions 2 to 3 1 Specifications 4 2 How to order 5 3 Construction Operation 6 to 8 4 Precautions 9 to 10 5 Replacement Part List 11 6 Maintenance 12 7 Troubleshooting 12 Attachment Procedure for M...

Page 3: ...ipment failure when configuring the equipment 2 Only personnel with appropriate training should operate machinery and equipment The product specified here may become unsafe if handled incorrectly The...

Page 4: ...lure of the product 3 Prior to using SMC products please read and understand the warranty terms and disclaimers noted in the specified catalog for the particular products 2 Vacuum pads are excluded fr...

Page 5: ...O C 5 to 150 for gate 5 to 60 for moving part Operating fluid Inertia vacuum Operating times s 0 6 to 1 2 Position detection Auto switch D A93 Main materials for vacuum part Seal material FKM Material...

Page 6: ...f MESC Cassette The number of axes and sealing type 1 axes and bellows Valve size 3 for 300mm wafer Model of high vacuum slit valve Auto switch and connector Symbol Auto switch Connector NIL Not provi...

Page 7: ...6 3 Construction Operation 3 1 Construction...

Page 8: ...y an O ring 3 2 2 Closing gate Figure 2A to Figure 2B The roller block integrated with the piston rod moves up when pressure is applied to CLOSE side of pressure piping in other words pressure is exha...

Page 9: ...ght around the roller bearing A whose position is fixed by the fulcrum groove and the gate stops clamping At this time the roller bearing B held to the lever and the plate 27 held to the roller block...

Page 10: ...ocking valve with no operating pressure applied first apply pressure to operating port which can remain the gate at open or close position as the gate is at the moment and then release end lock and sw...

Page 11: ...ating part Touching moving part with hands during operation may cause injury 5 Please exhaust all pressure in cylinder with disconnecting air piping on operating part at valve maintenance 4 7 Replacem...

Page 12: ...336 C XGT311 50336A1 1F For XGT31 50336 F Gate ASSY XGT300 2 1S Body O ring FKM XGT300 9 10S AS568 273 Gate O ring FKM XGT300 9 9S For XGT31 50336 1 AS568 271 Kalrez 4079 XGT300 9 11S For XGT31 50336...

Page 13: ...eplace bonnet ASSY External leakage Breakage of bellows Replace bellows O ring deterioration caused by process Replace it to the O ring with appropriate material Flaws on seat surface Polish seat surf...

Page 14: ...13 C...

Page 15: ...14...

Page 16: ...15...

Page 17: ...ember 2021 4 14 1 Sotokanda Chiyoda ku Tokyo 101 0021 JAPAN Tel 81 3 5207 8249 Fax 81 3 5298 5362 URL http www smcworld com Note Specifications are subject to change without prior notice and any oblig...

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