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19-5225S-M-01 Rev 2
2
1.1 Overview
The Digital AeroBar Model 5225S is specifically designed for use in
a variety of applications, ranging from inside tools to work stations
and cleanroom areas where digital performance with easy
integration is desired.
The Model 5225S operates as a standalone system with internally
maintained settings. Setup and adjustment are performed with the
infrared Handheld Remote.
The AeroBar Model 5225S is available in five standard lengths:
• 22 inches (558 mm)
• 28 inches (711 mm)
• 44 inches (1118 mm)
• 64 inches (1626 mm)
• 84 inches (2134 mm)
Three lengths are also available with optimized placement of
emitter points over the FOUP openings for use in 300 mm EFEMs.
• 36 inches (907 mm)
• 56 inches (1412 mm)
• 76 inches (1918 mm)
Summary of Contents for AeroBar 5225S
Page 5: ...19 5225S M 01 Rev 2 1 1 Description 1 1 Overview 1 2 Remote Control 1 3 Power Requirements...
Page 12: ...19 5225S M 01 Rev 2 8...
Page 42: ...19 5225S M 01 Rev 2 38...
Page 51: ...19 5225S M 01 Rev 2 47...
Page 57: ...19 5225S M 01 Rev 2 53 5 3 Dimensional Drawings Standard Lengths...
Page 58: ...19 5225S M 01 Rev 2 54 300 mm EFEM Application Lengths...
Page 59: ...19 5225S M 01 Rev 2 55...
Page 61: ...19 5225S M 01 Rev 2 57...
Page 62: ...19 5225S M 01 Rev 2 58 Notes...