Simco-Ion AeroBar 5225S, User Manual

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19-5225S-M-01 Rev 2 11
2.1 Mounting
General Guidelines
Installation methods will vary, as all process equipment has
different requirements. Use the following general guidelines:
• Install AeroBars away from all moving components in the tool or
environment.
• Place AeroBars directly in the airflow from HEPA filters for
effective ionization discharge.
• Make sure that there are no obstructions in the airflow between
the AeroBar and the surfaces to be neutralized.
• Ensure there is unobstructed airflow over emitter points.
• Keep emitter points at least 4 inches (100 mm) from grounded
surfaces, including tool frames, skins, and other modules.
• Keep the AeroBars within a 12-36” (300-900 mm) working
distance from the wafers.
Keep in mind the following considerations when determining
locations for the units:
• Tool and mini-environment requirements/restrictions
• Line of sight to infrared LED on the bar
• Applicable SEMI standards
• Applicable National Electrical Code standards
• The least amount of distance for cables from the Interface
Module to AeroBars
Clips
Various mounting clips are available from Simco-Ion.
In general:
• Hold the bar to the grid or other structure and mark the locations
where the mounting clips will attach.
• Attach the clips to the AeroBar and mount them at the marked
locations. Check to make sure all clips are secure, and that the
AeroBar is held firmly in position.