Chapter 2
SQM-242 CoDep
2-3
2.2 Edit: Auto/Manual Mode
When Edit is clicked while Auto or Manual mode is selected, a dialog box is displayed
which contains additional output control settings.
Note: The type of dialog displayed depends on whether the output is configured as a
control output (Auto/Manual/Off), or as a Recorder output. See the next section for
information on recorder outputs.
These controls are common to most dialog boxes in the program:
OK
Saves the settings in the dialog box, sends them to the SQM-242
card, and closes the dialog box.
Cancel
Closes the dialog box without saving the settings or sending them
to the SQM-242 card.
Update
Saves the settings in the dialog box, sends them to the SQM-242
card, but does not and close the dialog box.
Input:
Selects the sensor(s) or analog input used as an input to the output’s PID control
loop.
Click Sensors to configure the loop for quartz sensor inputs. If more than one sensor is
selected, their averaged rate and thickness readings are used by the PID control loop
and displayed on the main screen.
If an analog input is selected, quartz sensors are disabled. Only a single analog input
can be selected. Analog inputs extend deposition control to non-quartz sensor inputs.
Perhaps you want to control a backfill gas during deposition. You can use an analog
input to measure pressure from a manometer, and the control output to drive a gas flow