Chapter 1
Installation
1-1
1.0
Introduction
The SQM-242 Card is a powerful Thin Film Deposition Controller on a PCI card.
Significant features include:
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Measure four 1MHz to 10MHz quartz crystal sensors simultaneously.
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Controls two deposition source supplies simultaneously (co-deposition).
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Install multiple cards for up to 24 sensors and 12 control outputs!
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Measure four +/- 10V analog inputs with optional (SAM-242) piggyback card.
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Installs in any PC running Windows 98/2000/ME/XP.
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Interfaces to your program with Windows DLL and Active X interfaces.
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Sample Visual Basic and LabView programs with source code are included.
˝˝
SQM-242 Deposition Control Card
The sample SQM-242 CoDep software included with SQM-242 card allows you to:
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Co-deposit up to six materials, using up to eight sensors.
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Use analog inputs to control heaters, gas flow, and other process variables.
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Use outputs for recording rate, thickness, power, or voltage.
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Save film setup parameters and deposition data to disk.
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Simulate deposition for developing and testing film setups.
The optional SQS-242 software allows multi-layer deposition recipes, graphics, flexible
PLC-based digital I/O and RS-232/Ethernet external control.
