Shimadzu TMP-3203LM, Instruction Manual, Page: 61 / 62

FE9M-E0122
SHIMADZU CORPORATION
TMP Evaluation Form
Please fill out this evaluation form and attach to the product when you send it back to Shimadzu Service Center for repair
service, etc. When you fill out this form, please describe the details as much as possible.
Evaluation items (Please check the item box, and fill out the information at the underline.)
Returned
： □
Pump Type TMP- Product No.
□
Power source Type EI- Product No.
Request
： □
Overhaul
□
repair
□
others
Detail
Alarm name
：
(If there is status indication lamp, light No is
：
)
System/Equipment name ：
Date of request (date of occurrence)
：
Expected date of treatment completion
：
Total operation hours
：
hrs. Date of operation start
：
Date of delivery
：
Please fill out the following items to make sure of worker's safty.
[Announcement of attraction material and gas]
Repair etc. may not be accepted when attraction material and gas is not removed.
・
Type of attraction material
：
(Please fill out the etched material in etch system/equipment (GaAs substrate etc.).Please fill out
the material of target in PVD system/equipment (sputter, vacuum evaporation etc.).
・
Type of attraction gas
□
Air, nitrogen, etc. (name
：
)
□
Inert gas such as helium, etc. (name
：
)
□
Corrosive gas (name
：
)
□
Reactive/active gas (name
：
)
□
Virulent gas (name
：
)
□
Others (name
：
)
Attraction gas (
□：
removed,
□：
not removed) Influence on man's body.(
□
YES,
□
NO)
Treatment procedure, handling precaution, etc. for case when attraction gas is not removed.
・
Is there a color changes and adhesion at inlet and outlet flange?
□
Yes
□
No
If there is a color changes and adhesion, we wash the TMP to keep an appropriate performance of
vacuum pump.(additional charges)
Customer(Company) ： Division ： Phone # ：
Contact Person
：
(ext.#) Authorized signature
：
Use condition of equipment
：
Gas purge
：□
Used ( ml/min)
□
Not used (none)
For the oil type bearing
：
Oil type
：□
Standard oil
□
Fluorine base oil(designated oil)
□
Others( )
Oil level
：□
near upper limit
□
medium point
□
near lower limit
□
less than lower limit
Others
：
Dealer name
：
Contact Person
：
Tel