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Magnetically Levitated Turbo Molecular Pump
INSTRUCTION MANUAL
○
Explanation of label
(1) HOT SURFACE label
Risk of burn. Keep off from touching surface of the
pump as it is heated.
(2) INSTALL PUMP label
Incidental accident will cause the pump to drop
out and to make a catastrophe if the pump is fixed
by insufficient method.
Fix the pump to the device according to 5.1.2
「
Installation of the Pump
」
.
(3) SECURITY seal
This label certificates that the product was made
or maintenanced by Shimadzu or by Shimadzu
authorized facility .
In case "this label is removed" or "there is a mark
showing once this label has been removed",
Shimadzu warranty shall not be applied to the
product.
○
Location of label
Series of TMP-3203 and TMP-3403LMC
Label attachment phase
(2)
(1)
(3)
(2), (3)
(1)
(2)
(1)
(1)
CAUTIO N
!
高温 注 意
HOT SURFACE
Risk of burn. Avoid contact.
やけどのおそれがあります。触らないで下さい。
警 告
ポンプが装置から外れ,人体を傷つける
恐れがあります。取扱説明書に従い確実
にポンプを固定してください。
WARNING
263-16180
CAN CAUSE INJURY BY DROPED
PUMP, INSTALL PUMP SECURELY
ACCORDING TO INSTRUCTION
MANUAL.
Summary of Contents for TMP-3203LM
Page 13: ...Table of contents xii 263 13236 This page is intentionally left blank...
Page 20: ...2 2IDENTIFICATION AND FUNCTION 2 1 Pump Main Unit...
Page 22: ...3 3CONSTRUCTION AND PRINCIPLE 3 1 Pump Construction 3 2 Principle of Turbo Molecular Pumping...
Page 41: ...SECTION 5 INSTALLATION 28 263 13236 5 This page is intentionally left blank...
Page 48: ...7 7GAS PURGE...
Page 51: ...SECTION 7 GAS PURGE 38 263 13236 7 This page is intentionally left blank...
Page 56: ...9 9TROUBLESHOOTING 9 1 Vacuum Pressure Rise 9 2 Abnormal Noise and or Vibration...