Shimadzu TMP-3203LM, Instruction Manual, Page: 5 / 62

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CAUTION
After having operated the turbo molecular pump for evacuation of corrosive gas, keep the
pump internal as vacuumed even after shutdown. Inflow of water content in the air to the pump
internal would cause rapid erosion trouble of the pump internals.
CAUTION
Avoid to install the pump at the following places.
(1) Place where the pump is inevitably exposed to significant vibration and impact.
(2) Unstable place.
(3) Place where the pump is inevitably exposed to magnetic field and radioactive ray.
The pump proper is a precision machine. Be careful not to apply abnormal vibration, shock/
impact to it during transportation.This pump is not connected to grand. Please provide
PE(Protective earth) connection to the chassis of pump in final application.
CAUTION
The following "CAUTIONS" are to prevent operation anomalies.
1.This turbo molecular pump is not approved for use in applications exhausting process gas
containing gallium (Ga, e.g., triethyl gallium, etc.).
2.Protect the pump from any and all types of impact during operation.
3.Do not operate any equipment (i.e. drill motor, welding machine, etc.) that produces electro-
magnetic pollution, noise, etc., in the immediate proximity of an operating turbo molecular
pumping system (pump, power supply, cables, etc).
4.Do not interrupt the electrical power operating the turbo molecular pump while the turbo
molecular pump is in operation.
5.Do not connect or disconnect the turbo molecular pump control cable during the time the
power supply is "ON".
6.Be sure to use the chemical type pumps to exhaust of gas which contain chlorine, or fluorine.
7.Plasmas may cause the pump rotor to discharge electrically thus damaging the electrical
components.
8.When using the variable speed function to change the pump rotation rate, use a rotation rate
that does not cause resonance with other devices installed at the site.