Shimadzu TMP-3203LM, Instruction Manual, Page: 27 / 62

SECTION 4 SPECIFICATIONS
14
263-13236
4
4.1
Pump Main Unit
4.1.1
Specification of series of TMP-3203
(Note 1) When using a metal gasket at the inlet flange. When using an o-ring gasket , the
ultimate pressure is 10
-7
Pa order.
(Note 2) mL/min : volume flow rate at 0 ℃ , 1 atm. (Compatible with SCCM.)
(Note 3) Without a protective net. Pumping speed for N
2
is 2950 L/s with a protective net.
(Note 4) The outlet flange of the turbo molecular pump should face horizontally or vertically
when installing the pump horizontally and obliquely.
(Refer to 5.1.1
「 Pump Mounting Direction 」 )
(Note 5) VG300, VG250 and ISO320B Special are also available.
Turbo molecular pump model TMP-3203M TMP-3203MC TMP-3203LM TMP-3203LMC
Cooling method Cooling fan Water
Ultimate pressure (Note 1) 10
-9
Pa order 10
-8
Pa order 10
-9
Pa order 10
-8
Pa order
Maximum Argon gas through put
(Note 2)
250 mL/min 400 mL/min 1200 mL/min 2200 mL/min
Maximum allowable inlet pressure
(Nitrogen gas)
0.4 Pa 40 Pa
Maximum allowable outlet
pressure
40 Pa 270 Pa
Pumping speed N
2
（
Note 3
）
He
H
2
3200 L/s
3000 L/s
2400 L/s
Compression ratio N
2
He
H
2
1
×
10
9
or more
3
×
10
5
1
×
10
4
Rated speed 21000 rpm
Start-up time 13 minutes
Mounting position
In any desired direction
（
Note 4
）
Bake-out temperature at an inlet
flange
120 ℃ or less
Vibration level (by Shimadzu's
method)
0.01 μ m or less (0-peak)
Inlet flange
VG350
（
Note 5
）
Outlet flange KF40
Mass 70 kg
Admissible throughput of purge
gas
20 to 30 mL/min （ Note 2 ）
Admissible pumping speed of
backing vacuum pump in case of
gas purge
1500 L/min or more
Environmental Temperatures
Operation : 0 to 40
℃
/ Storage : -25 to 70
℃
Admissible ambient magnetic field
Radial direction
Axial direction
3 mT
15 mT
Water Flow rate
Pressure
Temperature
N/A
2 to 4 L/min
0.2 to 0.5 MPa
5 to 25
℃