Shimadzu TMP-3203LM, Instruction Manual, Page: 53 / 62

SECTION 8 TURBO MOLECULAR PUMP RECONDITION
40
263-13236
8
8.1
Turbo Molecular Pump Return Request
WARNING
Improper turbo molecular pump use may be hazardous to operator's health in applications not
recommended or approved by Shimadzu. In the event removal of the turbo molecular pump from
an application is required, full protective measures including purging of the turbo molecular pump
with an inert gas and/or apparel are recommended when the turbo molecular pump has been
used in applications that required the use of corrosive, reactive, stimulative, or toxic gases.
Annual overhaul is recommended.
Overhaul, re-manufacturing, refurbishing, or repair of the turbo molecular pump system should
always be performed by Shimadzu or an approved service company. (A copy of this from is
printed at the end of this manuals "Repair of Magnetic Bearing Turbo Molecular Pump")
The following precautions are required before forwarding the turbo molecular pump to
Shimadzu or an approved service company for all service related requests.
(1) The turbo molecular pump must be void of all process gases. Turbo molecular pumps that
were operated in applications using special gases (doping gas, epitaxial gas, film forming
gas, etching gas, etc.), likely have the process by-products, reaction-produced matter, etc.
Remove them from the turbo molecular pump by repeated gas purge to the pump and fill the
pump with an inert gas. The pump interior must be adequately purged with inert gas before
uninstalling from the unit.
(2) The customer is required to submit MSDS (Material Safety Data Sheet) sheets and
information of all gases, materials, etc. that have been associated with the turbo molecular
pump.
Shimadzu will accept and perform service only on turbo molecular pumps that have been
properly prepared as stated in (1) and (2) above. Shimadzu will advice the customer of any failure
precaution/prevention procedures that are appropriate to each individual turbo molecular pump
service request.
Remove the pump in the manner shown in Fig. 8-1.
Fig. 8-1 Way to remove the pump
Vacuum
chamber
Vacuum
chamber
PUMP
PUMP