1. Specifications Check
23
1.2.4 Cleanroom Specification
Cleanliness
Class 10 (0.1
μ
m)
Pipe joint for
vacuuming
Quick joint
Applicable Tube O. D. =
φ
6
RTBS/RTBSL/RTCS/RTCSL
RTB/RTBL/RTC/RTCL RTBB/RTBBL/RTCB/RTCBL
Vacuuming flow
volume
10 Nl/min
15 Nl/min
20 Nl/min
1.2.5 Dustproof/Splash Proof Specification
Protection Class IP54 or equiv.
Pipe joint for air
purge
Quick joint
Applicable Tube O. D. =
φ
6
RTBS/RTBSL/RTCS/RTCSL
RTB/RTBL/RTC/RTCL RTBB/RTBBL/RTCB/RTCBL
Air purge flow
volume
15 Nl/min
20 Nl/min
40 Nl/min