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PI Q-521, User Manual

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PI Q-521 User Manual Download Page 55

 

 

10 Technical Data 

Q-521 Miniature Linear Stage 

MP145E 

Version: 1.0.1 

51 

Miscellaneous  Q-521.130  Q-521.140/ 

Q-521.14U 

Q-521.230 

Q-521.240 / 

Q-521.24U 

Q-521.330 

Q-521.340 / 

Q-521.34U 

Q-521.x00 / 

Q-521.x0U 

Unit 

Material 

Stainless 

steel 

Stainless 

steel 

Stainless 

steel 

Stainless 

steel 

Stainless 

steel 

Stainless 

steel 

Stainless 

steel 

 

Cable length  1 

1 

1 

1 

1 

1 

1 

m 

Connector 

Sub-D 

Sub-D 

Sub-D 

Sub-D 

Sub-D 

Sub-D 

Sub-D 

 

Mass incl. 

cable and 

connector 

110 

Q-521.140: 

110 
Q-521.14U: 

66

 

126 

Q-521.240: 

126 
Q-521.24U: 

78

 

135 

Q-521.340: 

135 
Q-521.34U: 

92

 

Q-521.100: 

110 
Q-521.200: 

126 
Q-521.300: 

135 
Q-521.10U: 

66 
Q-521.20U: 

78 
Q-521.30U: 

92

 

g 

Mass without 

cable and 

connector 

24 

Q-521.140: 

24 
Q-521.14U: 

24

 

34 

Q-521.240: 

24 
Q-521.24U: 

34

 

48 

Q-521.340: 

48 
Q-521.34U: 

48

 

Q-521.100: 

24 
Q-521.200: 

34 
Q-521.300: 

48 
Q-521.10U: 

24 
Q-521.20U: 

34 
Q-521.30U: 

48

 

g 

Recommended 

electronics 

E-873.1AT, E-873.3QTU, E-873.10C885 

E-872.401   

* Typical velocity at a control frequency of 20 kHz 

For operation in a vacuum, we recommend a reduced duty cycle of 20% and a maximum motor push/pull force of 30% compared to a standard environment. The intrinsic 

mass of the slider plate must be considered accordingly. 

 

The specifications were determined on a surface with an evenness of 2 µm. 

 

 

Summary of Contents for Q-521

Page 1: ...ive This document applies to various model versions of the Q 521 The model version of the Q 521 is coded in the order number by means of three characters after a period Meaning of the characters and valid values First character after the period Travel range 1 12 mm 2 22 mm 3 32 mm Second character after the period Sensor equipment 0 without sensor 3 with sensor sensor resolution 4 nm 4 with sensor...

Page 2: ...GmbH Co KG Karlsruhe Germany The text photographs and drawings in this manual are protected by copyright With regard thereto Physik Instrumente PI GmbH Co KG retains all the rights Use of said text photographs and drawings is permitted only in part and only upon citation of the source Original instructions First printing 29 01 2019 Document number MP145E KSch version 1 0 1 Subject to change withou...

Page 3: ...6 Suitable Electronics 14 3 7 Technical Features 14 3 7 1 Linear Encoder Sensor 14 3 7 2 Reference Point Switch 14 3 7 3 ID Chip 14 4 Unpacking 15 5 Installation 17 5 1 General Notes on Installation 17 5 2 Mounting the Q 521 on a Surface and Connecting It to a Protective Earth Conductor 19 5 3 Setting Up a Multi Axis System 21 5 3 1 General Information on Setting Up a Multi Axis System 22 5 3 2 Se...

Page 4: ...Ambient Conditions and Classifications 52 10 2 Operating Time 53 10 3 Dimensions 54 10 3 1 Q 521 1xx 54 10 3 2 Q 521 2xx 55 10 3 3 Q 521 3xx 56 10 3 4 Q 121 80U Adapter Plate 57 10 3 5 Q 121 10U Adapter Bracket 58 10 3 6 Q 121 20U Adapter Bracket 59 10 3 7 Q 121 30U Adapter Bracket 60 10 3 8 Vacuum Feedthroughs 61 10 4 Pin Assignment 67 10 4 1 Q 521 xx0 vacuum compatible to 10 6 hPa 67 10 4 2 Q 52...

Page 5: ...systems as well as motion control concepts and applicable safety procedures The latest versions of the user manuals are available for download p 3 on our website 1 2 Symbols and Typographic Conventions The following symbols and typographic conventions are used in this user manual CAUTION Dangerous situation If not avoided the dangerous situation will result in minor injuries or damage to the equip...

Page 6: ...planation Load capacity Maximum load capacity in the vertical direction when the linear stage is mounted horizontally The contact point of the load is in the center of the motion platform Linear encoder The linear encoder is an incremental sensor for capturing changes in position Signals from the sensor are used for axis position feedback After switching on the controller a reference point definit...

Page 7: ...ontroller module for PIMotionMaster 1 axis for systems with piezoelectric inertia drive E873T0002 Technical Note PIMikroMove SM148E Software Manual 1 6 Downloading Manuals INFORMATION If a manual is missing or problems occur with downloading Contact our customer service department p 47 INFORMATION For products that are supplied with software CD in the scope of delivery access to the manuals is pro...

Page 8: ...e to the content for your product and log in using the access data that you received General procedure 1 Open the website www pi ws 2 If access to the manuals is protected by a password a Click Login b Log in with the user name and password 3 Click Search 4 Enter the product number up to the period e g P 882 or the product family e g PICMA Bender into the search field 5 Click Start search or press...

Page 9: ... p 49 The Q 521 is not intended for applications in areas in which a failure would present severe risks to human beings or the environment For further information on the operating conditions of the Q 521 see Technical Data p 49 Some models of the Q 521 are equipped with a linear encoder for direct position measurement The intended use of the Q 521 is only possible when completely mounted and conne...

Page 10: ...er manual can result in minor injury and damage to equipment Only install and operate the Q 521 after you have read and understood this user manual Personnel qualification The Q 521 may only be installed started up operated maintained and cleaned by authorized and appropriately qualified personnel 2 4 Measures for Handling Vacuum Compatible Products When handling the vacuum version of the linear s...

Page 11: ... a period see also Detailed model names Each character codes a feature of the model version First character Second character Third character Feature Travel range Sensor linear encoder Vacuum suitability Feature value 1 12 mm 2 22 mm 3 32 mm 0 without sensor 3 with sensor sensor resolution 4 nm 4 with sensor sensor resolution 1 nm 0 suitable to 10 6 hPa U suitable to 10 9 hPa If the value x is used...

Page 12: ...ce dimensions 21 32 10 mm W L H vacuum compatible to 10 6 hPa Q 521 20U Q Motion Miniature linear stage piezoelectric inertia drive 22 mm travel range without position sensor for open loop operation 1 N push pull force dimensions 21 32 10 mm B L H vacuum compatible to 10 9 hPa Q 521 230 Q Motion Miniature linear stage piezoelectric inertia drive 22 mm travel range linear encoder 4 nm resolution 1 ...

Page 13: ...le to 10 6 hPa Q 521 34U Q Motion Miniature linear stage piezoelectric inertia drive 32 mm travel range linear encoder 1 nm resolution 1 N push pull force dimensions 21 42 10 mm W L H vacuum compatible to 10 9 hPa 3 2 Product View Figure 1 Example for models without sensor Q 521 200 linear stage 1 Motion platform 2 Cable exit for drive connector 3 Connector for drive with Q 521 x00 models Sub D 15...

Page 14: ...static sensitive devices 4 Connector for drive and sensor with Q 521 xx0 models Sub D 15 m connector with Q 521 xxU models Sub D 15 f connector 5 ESD protection ESD protective cap with Q 521 xx0 nonconductive foil with Q 521 xxU 6 Type plate p 11 7 Base body Figure 3 Direction of motion of the platform of the Q 521 Q 521 240 used as an example The arrow in the figure above shows the direction of m...

Page 15: ...s the protective earth connection of the Q 521 p 19 B C Warning sign Pay attention to the manual B C CE conformity mark C 113064246 Serial number example individual for each Q 521 Meaning of the places counting from left 1 internal information 2 and 3 year of manufacture 4 to 9 consecutive numbers C Q 521 240 Product name example the characters following the period refer to the model C Old equipme...

Page 16: ... cable for connection to the E 872 401 drive electronics Sub D 15 f to LEMO 3 pin m 0 15 m Only for models suitable for operation to 10 9 hPa 5604500041 Adapter for operation outside of a vacuum chamber Sub D 15 m m 3 5 Accessories Order number Description E 873 UHV1 Air side extension cable from vacuum feedthrough or Q 521 xx0 to the adapter cable to the electronics Sub D 15 f to Sub D 15 m 1 m E...

Page 17: ...owel pins A2 1 5 m6 x 5 ISO 2338 6 machine screws 1 4567 M2x8 Q 121 20U Q 121 30U For Q 521 xx0 models only suitable for use in a vacuum to 10 6 hPa Order number Description C 815 VF Vacuum feedthrough drive and sensor signals Sub D 15 m f including C815T0003 Technical Note For Q 521 xxU models only suitable for use in a vacuum to 10 9 hPa Order number Description C 815 VFU1 Vacuum feedthrough dri...

Page 18: ... encoder resolution refer to the table in the Specifications section p 49 Optical linear encoders measure the actual position directly direct metrology Therefore errors occurring in the drivetrain such as nonlinearity backlash or elastic deformation cannot influence the measurement of the position 3 7 2 Reference Point Switch The Q 521 models equipped with a sensor have an optical reference point ...

Page 19: ... cleaned before assembly During assembly and measurement powder free gloves are worn In addition the Q 521 xxU models are wipe cleaned afterwards and then shrink wrapped twice in vacuum compatible film Touch the linear stage only with powder free gloves If necessary wipe the linear stage clean after unpacking 1 Unpack the Q 521 with care 2 If present do not remove the ESD protection from the conne...

Page 20: ......

Page 21: ...he Q 521 30 Connecting the Q 521 to the Electronics 32 5 1 General Notes on Installation Figure 5 Accessible when the motion platform is driven out Ceramic rail of the PIShift drive and for models with sensor ruler of the linear encoder example Q 521 240 NOTICE Damage from mechanical actions The ruler of the linear encoder is scratch sensitive and can be damaged by mechanical actions e g from poin...

Page 22: ...he application is not impaired by the dissipated heat Ensure sufficient ventilation at the place of installation Make sure that the complete bottom side of the Q 521 is in contact with the surface on which the Q 521 is mounted NOTICE Unintentional changes in position If the load exerts a force on the motion platform that exceeds the self locking see holding force on p 49 of the drive e g by cables...

Page 23: ...ounting the Q 521 on a Surface and Connecting It to a Protective Earth Conductor NOTICE Protruding screw heads Protruding screw heads can damage the Q 521 Ensure that the screw heads do not protrude from countersunk holes so that they do not interfere with the motion NOTICE Warping of the Q 521 due to mounting on uneven surfaces Mounting the Q 521 on an uneven surface can warp the Q 521 Warping re...

Page 24: ... suitable surface for the required position and depth of the holes for accommodating the screws and locating pins see Dimensions p 54 The surface must be connected to the protective earth conductor The contact surfaces to the bottom side of the linear stage have to be sufficiently conductive to ensure the proper functioning of the protective earth conductor The contact resistance at all connection...

Page 25: ... 1 Option Align the Q 521 on the surface with the locating pins 2 Mount the Q 521 on the surface Maximum torque 35 Ncm For mounting from above If necessary manually displace the motion platform of the Q 521 to access the countersunk holes in the base body For mounting from below Maximum screw in depth in the Q 521 4 mm 3 Secure the screws against unintentional loosening e g with thread locking adh...

Page 26: ... used for the Y and or Z axis must also be moved Impermissibly high loads impair the motion and can damage the linear stages Include the masses of the moved linear stages and the mounting adapters p 12 in the calculation of the load to be moved For all linear stages in a multi axis system Do not exceed the maximum permissible load When a linear stage is mounted vertically make sure that the instal...

Page 27: ...NFORMATION Any model of the Q 521 can be used as lower or upper linear stage Designations in these instructions Lower linear stage Forms the basis of the multi axis system X axis is mounted on a surface Upper linear stage Forms the Y axis of the multi axis system is mounted on the lower stage rotated by 90 Requirements You have read and understood the general notes on installation p 17 You have re...

Page 28: ... 1 Lower linear stage 2 2 locating pins 1 5 m6 x 4 3 Q 121 80U adapter plate 4 2 machine screws M2x4 5 2 locating pins 1 5 m6 x 4 6 2 socket head cap screws M2x6 7 Upper linear stage 1 Mount the adapter plate on the lower linear stage with locating pins and M2x4 machine screws The counterbores of the three holes in the middle of the adapter plate point upwards Maximum torque 35 Ncm Check that adap...

Page 29: ...emperature changes Large temperature changes can cause warping of the Z system because the Q 521 and the adapter bracket for the vertical mounting p 12 have different thermal expansion properties Warping reduces the accuracy Avoid large temperature changes for the Z system If it is not possible to avoid large temperature changes Do not use the locating pins for mounting Designations in these instr...

Page 30: ...adapter bracket and upper linear stage to the lower linear stage Combination of linear stages and adapter bracket 0 90 180 270 Q 521 1xx Q 121 10U Q 521 2xx Q 121 10U Not possible The motion platforms of the linear stages collide with each other Not possible The motion platforms of the linear stages collide with each other ...

Page 31: ...adapter bracket and upper linear stage to the lower linear stage Combination of linear stages and adapter bracket 0 90 180 270 Q 521 2xx Q 121 20U Q 521 3xx Q 121 20U Not possible The motion platforms of the linear stages collide with each other Not possible The motion platforms of the linear stages collide with each other ...

Page 32: ... and understood the general notes on setting up a multi axis system p 22 You have accounted for the space required to route cables without bending and according to regulations If you set up an XZ combination You have properly mounted the lower linear stage on a surface If you set up an XYZ combination You have properly mounted the linear stages for the X and Y axis p 23 Tools and accessories Suita...

Page 33: ...ls for tightening the screws Setting up a Z system with an adapter bracket Figure 9 Example Setting up an XZ system consisting of two Q 521 240 and a Q 121 20U adapter bracket 1 Lower linear stage 2 4 locating pins 1 5 m6 x 5 3 Q 121 20U adapter bracket 4 6 machine screws M2x8 5 Upper linear stage 1 Mount the upper linear stage to the long side of the adapter bracket Align the upper linear stage s...

Page 34: ...igh forces and torques that are applied to the motion platform can damage the Q 521 For affixing type and mass of the load pay attention to the maximum permissible forces according to the specifications p 49 Avoid tilting torques at the motion platform NOTICE Screws and locating pins that are too long Screws and locating pins that are inserted too deeply damage the Q 521 Pay attention to the depth...

Page 35: ...properly mounted the linear stage on a surface p 19 or on a Q 521 p 21 The linear stage is disconnected from the electronics You have prepared the load so that it can be affixed to the motion platform The distance between the center of gravity of the load and the center of the motion platform is as small as possible in all directions At least three points are provided for affixing the load on the ...

Page 36: ...to the Electronics The electronics to be used for operating the Q 521 depends on the presence of a sensor see also Suitable Electronics p 14 Models without sensor Q 521 x0x E 872 drive electronics Models with sensor Q 521 x3x Q 521 x4x E 873 controller INFORMATION The Q 521 and the electronics can be delivered as a preconfigured system If a connection assignment is given on the labels of the Q 521...

Page 37: ...nnecting for Operation at Atmospheric Pressure Figure 10 Possible connection of the Q 521 to suitable electronics for operation at atmospheric pressure 1 Controller 2 Drive electronics 3 Adapter cable 4 Extension cable 5 Adapter for operation outside of the vacuum chamber 6 Linear stage ...

Page 38: ...Operation in Vacuum to 10 9 hPa Figure 11 Possible connection of the Q 521 to suitable electronics for operation in vacuum 1 Controller 2 Drive electronics 3 Adapter cable 4 Extension cable 5 Vacuum feedthrough for a pressure to 10 9 hPa 6 Vacuum feedthrough for a pressure to 10 6 hPa 7 Linear stage ...

Page 39: ...Tools and accessories 4 countersunk screws M3 ISO 7046 of suitable length made of stainless steel Installing a vacuum feedthrough For the C 815 VF vacuum feedthrough Install the vacuum feedthrough so that the Sub D 15 f socket is on the vacuum side of the vacuum chamber Pay attention to a maxiumum torque of 0 9 Nm 5 5 3 Connecting the Q 521 to the Electronics Requirements You have read and underst...

Page 40: ...815 VFUx suitable for use in a vacuum to 10 9 hPa Suitable tools for installing the vacuum feedthrough Connecting the Q 521 to the electronics 1 Remove the ESD protection from the connection of the Q 521 2 If the Q 521 is to be operated in a vacuum Install the vacuum feedthrough a Obtain the dimensions from the corresponding dimensional drawing p 61 b Make sure that the vacuum feedthrough is orien...

Page 41: ...re startup Do not remove the protective earth conductor during operation If the protective earth conductor has to be removed temporarily e g in the case of modifications reconnect the Q 521 to the protective earth conductor before starting it up again CAUTION Burning from hot surface The surface of the Q 521 and its vicinity can heat up during operation Touching the Q 521 and surrounding parts can...

Page 42: ...1 only with controllers drivers and original accessories from PI Do not exceed the operating voltage range p 52 for which the Q 521 is specified Operate the Q 521 only when the operating voltage is properly connected see Pin Assignment p 67 NOTICE Operating frequency too high An excessively high operating frequency can cause damage to the Q 521 Only operate the Q 521 with controllers drivers and o...

Page 43: ... due to collisions Collisions can damage the linear stage the load to be moved and the surroundings Make sure that no collisions are possible between the linear stage the load to be moved and the surroundings in the motion range of the linear stage Do not place any objects in areas where they can be caught by moving parts Stop the motion immediately if an electronics malfunction occurs NOTICE Cons...

Page 44: ...ntion to the parameter settings depending on the electronics used either for the operating frequency in step mode or for the velocity with closed loop operation E 872 401 E 873 3QTU Operating frequency in step mode using parameter 0x1F000400 E 873 1Ax E 873 10C885 Velocity set by VEL closed loop operation INFORMATION The inertia drive generates noise in step mode The noise generation depends on th...

Page 45: ...ng frequency in step mode or the velocity see user manual of the electronics to your application also refer to General Notes on Startup and Operation p 37 and Operating Time p 53 In the user manual of the controller the startup is described using the PIMikroMove program Starting up the Q 521 x0x with E 872 drive electronics 1 Start up the linear stage see user manual of the drive electronics The s...

Page 46: ......

Page 47: ...orming a Maintenance Run The maintenance run must cover the entire travel range Perform the maintenance run after every 10 million steps 7 3 Cleaning the Q 521 Requirements You have disconnected the linear stage from the electronics Cleaning the linear stage Only when the linear stage is not used in vacuum When necessary clean the surfaces of the linear stage with a cloth that is lightly dampened ...

Page 48: ......

Page 49: ...e drive see Holding force power off on p 49 Parameters of the electronics incorrectly set See the Functional impairment after system modification problem in this table Operating voltage too low Provide an operating voltage of 48 V Unfavorable operating frequency for step mode Adapt the operating frequency for the step mode for details see Starting Up the Q 521 p 40 and manual of the electronics us...

Page 50: ...e Problem Possible causes Solution the motion platform back and forth Contact our customer service department p 47 If the problem that occurred with your system is not listed in the table above or cannot be solved as described contact our customer service department p 47 ...

Page 51: ...formation Product and serial numbers of all products in the system Firmware version of the controller if applicable Version of the driver or the software if applicable Operating system on the PC if applicable If possible Take photographs or make videos of your system that can be sent to our customer service department if requested The latest versions of the user manuals are available for download ...

Page 52: ......

Page 53: ...resolution 4 nm 22 mm travel range resolution 1 nm UHV version Q 521 24U 32 mm travel range resolution 4 nm 32 mm travel range resolution 1 nm UHV version Q 521 34U 12 mm to 32 mm travel range open loop UHV versions Q 521 x0U Active axis X X X X X X X Travel range 12 12 22 22 32 32 12 to 32 mm Integrated sensor Linear encoder Linear encoder Linear encoder Linear encoder Linear encoder Linear encod...

Page 54: ...rties Q 521 130 Q 521 140 Q 521 14U Q 521 230 Q 521 240 Q 521 24U Q 521 330 Q 521 340 Q 521 34U Q 521 x00 Q 521 x0U Unit Load capacity 10 10 10 10 10 10 10 N Length 30 30 32 2 32 2 42 2 42 2 30 to 42 2 mm Width 21 21 21 21 21 21 21 mm Height 10 10 10 10 10 10 10 mm Drive properties Q 521 130 Q 521 140 Q 521 14U Q 521 230 Q 521 240 Q 521 24U Q 521 330 Q 521 340 Q 521 34U Q 521 x00 Q 521 x0U Unit Mo...

Page 55: ...40 135 Q 521 34U 92 Q 521 100 110 Q 521 200 126 Q 521 300 135 Q 521 10U 66 Q 521 20U 78 Q 521 30U 92 g Mass without cable and connector 24 Q 521 140 24 Q 521 14U 24 34 Q 521 240 24 Q 521 24U 34 48 Q 521 340 48 Q 521 34U 48 Q 521 100 24 Q 521 200 34 Q 521 300 48 Q 521 10U 24 Q 521 20U 34 Q 521 30U 48 g Recommended electronics E 873 1AT E 873 3QTU E 873 10C885 E 872 401 Typical velocity at a control...

Page 56: ...1100 hPa to 10 6 hPa Q 521 xxU 1100 hPa to 10 9 hPa Relative humidity Highest relative humidity 80 for temperatures up to 31 C non condensing Decreasing linearly to 50 relative humidity at 40 C non condensing Operating temperature 0 C to 40 C Storage temperature 20 C to 70 C Transport temperature 20 C to 70 C Maximum bakeout temperature for Q 521 xxU 120 C for 12 hours only in switched off state M...

Page 57: ...nt overheating and increased wear the motion duration at the given velocity or given operating frequency may not exceed the values given in the following table Velocity in mm s Operating frequency in Hz1 Maximum duration of motionin s Idle time in s 10 20000 10 10 5 10000 20 10 2 5 5000 60 10 0 5 1000 120 10 1 For the relevant parameters see Starting up the Q 521 p 40 and the user manual of the el...

Page 58: ...echnical Data 54 Version 1 0 1 MP145E Q 521 Miniature Linear Stage 10 3 Dimensions 10 3 1 Q 521 1xx Dimensions in mm Note that the decimal places are separated by a comma in the drawings Figure 13 Q 521 1xx ...

Page 59: ...10 Technical Data Q 521 Miniature Linear Stage MP145E Version 1 0 1 55 10 3 2 Q 521 2xx Dimensions in mm Note that the decimal places are separated by a comma in the drawings Figure 14 Q 521 2xx ...

Page 60: ...10 Technical Data 56 Version 1 0 1 MP145E Q 521 Miniature Linear Stage 10 3 3 Q 521 3xx Dimensions in mm Note that the decimal places are separated by a comma in the drawings Figure 15 Q 521 3xx ...

Page 61: ...al Data Q 521 Miniature Linear Stage MP145E Version 1 0 1 57 10 3 4 Q 121 80U Adapter Plate Dimensions in mm Note that the decimal places are separated by a comma in the drawings Figure 16 Q 121 80U adapter plate ...

Page 62: ... Data 58 Version 1 0 1 MP145E Q 521 Miniature Linear Stage 10 3 5 Q 121 10U Adapter Bracket Dimensions in mm Note that the decimal places are separated by a comma in the drawings Figure 17 Q 121 10U adapter bracket ...

Page 63: ... Data Q 521 Miniature Linear Stage MP145E Version 1 0 1 59 10 3 6 Q 121 20U Adapter Bracket Dimensions in mm Note that the decimal places are separated by a comma in the drawings Figure 18 Q 121 20U adapter bracket ...

Page 64: ... Data 60 Version 1 0 1 MP145E Q 521 Miniature Linear Stage 10 3 7 Q 121 30U Adapter Bracket Dimensions in mm Note that the decimal places are separated by a comma in the drawings Figure 19 Q 121 30U adapter bracket ...

Page 65: ...VFU1 p 63 C 815 VFU3 p 64 C 815 VFU6 p 65 C 815 VFU15 p 66 For the C 815 VF vacuum feedthrough the recommended dimensions for a vacuum chamber opening can be found on p 62 C 815 VF vacuum feedthrough for 10 6 hPa Dimensions in mm Note that the decimal places are separated by a comma in the drawings Figure 20 C 815 VF vacuum feedthrough Sub D 15 m f ...

Page 66: ...ber opening for the C 815 VF vacuum feedthrough for 10 6 hPa Dimensions in mm Note that the decimal places are separated by a comma in the drawings Figure 21 Top View of the opening on the air side middle Section of the vacuum chamber as specified by the customer bottom View from the vacuum side ...

Page 67: ...ar Stage MP145E Version 1 0 1 63 C 815 VFU1 vacuum feedthrough for 10 9 hPa Dimensions in mm Note that the decimal places are separated by a comma in the drawings Figure 22 C 815 VFU1 vacuum feedthrough Sub D 15 m m 1 Vacuum side 2 Air side ...

Page 68: ...45E Q 521 Miniature Linear Stage C 815 VFU3 vacuum feedthrough for 10 9 hPa Dimensions in mm Note that the decimal places are separated by a comma in the drawings Figure 23 C 815 VFU3 vacuum feedthrough Sub D 15 m m 1 Vacuum side 2 Air side ...

Page 69: ...ar Stage MP145E Version 1 0 1 65 C 815 VFU6 vacuum feedthrough for 10 9 hPa Dimensions in mm Note that the decimal places are separated by a comma in the drawings Figure 24 C 815 VFU6 vacuum feedthrough Sub D 15 m m 1 Vacuum side 2 Air side ...

Page 70: ...5E Q 521 Miniature Linear Stage C 815 VFU15 vacuum feedthrough for 10 9 hPa Dimensions in mm Note that the decimal places are separated by a comma in the drawings Figure 25 C 815 VFU15 vacuum feedthrough Sub D 15 m m 1 Vacuum side 2 Air side ...

Page 71: ...ential Output 2 Motor Motor signal differential Input 3 Motor Motor signal differential Input 4 VDD 2 Supply voltage 5 V Input 5 6 ID chip data 2 ID chip data Output 7 SIN 2 Encoder A Output 8 COS 2 Encoder B Output 9 Motor Motor signal differential Input 10 GND GND GND 11 Motor Motor signal differential Input 12 13 REF Reference signal differential Output 14 SIN 2 Encoder A Output 15 COS 2 Encode...

Page 72: ...Output 3 ID chip data 2 ID chip data 2 Output 4 5 VDD 2 Supply voltage 5 V Input 6 Motor Motor signal differential Input 7 Motor Motor signal differential Input 8 REF 2 Reference signal differential Output 9 COS 2 Encoder B Output 10 SIN 2 Encoder A Output 11 REF 2 Reference signal differential Output 12 13 Motor Motor signal differential Input 14 GND GND GND 15 Motor Motor signal differential Inp...

Page 73: ...Air side m Pin Signal Function Pin 1 REF Reference signal differential 1 2 Motor Motor signal differential 2 3 Motor Motor signal differential 3 4 VDD Supply voltage 5 V 4 5 5 6 ID chip data ID chip data 6 7 SIN Encoder A 7 8 COS Encoder B 8 9 Motor Motor signal differential 9 10 GND GND 10 11 Motor Motor signal differential 11 12 12 13 REF Reference signal differential 13 14 SIN Encoder A 14 15 C...

Page 74: ...uum side Air side Pin Signal Function Pin 1 COS Encoder B 8 2 SIN Encoder A 7 3 ID chip data ID chip data 6 4 5 5 VDD Supply voltage 5 V 4 6 Motor Motor signal differential 3 7 Motor Motor signal differential 2 8 REF Reference signal differential 1 9 COS Encoder B 15 10 SIN Encoder A 14 11 REF Reference signal differential 13 12 12 13 Motor Motor signal differential 11 14 GND GND 10 15 Motor Motor...

Page 75: ...sion 1 0 1 71 10 4 5 5604500041 Adapter Sub D 15 m m The adapter is only required if a Q 521 xxU model is to be operated at atmospheric pressure i e without a vacuum feedthrough Figure 32 Sub D 15 m connector Figure 33 Pin assignment of the 5604500041 adapter ...

Page 76: ......

Page 77: ...ccording to international national and local rules and regulations In order to fulfil the responsibility as the product manufacturer PI miCos GmbH undertakes environmentally correct disposal of all old PI miCos equipment made available on the market after 13 August 2005 without charge Any old PI miCos equipment can be sent free of charge to the following address PI miCos GmbH Freiburger Strasse 30...

Page 78: ......

Page 79: ...claration of Conformity has been issued in accordance with the following European directives Low Voltage Directive EMC Directive RoHS Directive The applied standards certifying the conformity are listed below Safety Low Voltage Directive EN 61010 1 EMC EN 61326 1 RoHS EN 50581 12 EU Declaration of Conformity ...

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